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- W2089387780 abstract "Carbon deposition and removal experiments on Mo/Si multilayer mirror (MLM) samples were performed using extreme ultraviolet (EUV) light on Beamline 12.0.1.2 of the Advanced Light Source, Lawrence Berkeley National Laboratory (LBNL). Carbon (C) was deposited onto Mo/Si multilayer mirror (MLM) samples when hydrocarbon vapors where intentionally introduced into the MLM test chamber in the presence of EUV at 13.44 nm (92.3eV). The carbon deposits so formed were removed by molecular oxygen + EUV. The MLM reflectivities and photoemission were measured in-situ during these carbon deposition and cleaning procedures. Auger Electron Spectroscopy (AES) sputter-through profiling of the samples was performed after experimental runs to help determine C layer thickness and the near-surface compositional-depth profiles of all samples studied. EUV powers were varied from ~0.2mW/mm<SUP>2</SUP> to 3mW/mm<SUP>2</SUP>(at 13.44 nm) during both deposition and cleaning experiments and the oxygen pressure ranged from ~5x10<SUP>-5</SUP> to 5x10<SUP>-4</SUP> Torr during the cleaning experiments. C deposition rates as high as ~8nm/hr were observed, while cleaning rates as high as ~5nm/hr could be achieved when the highest oxygen pressure were used. A limited set of experiments involving intentional oxygen-only exposure of the MLM samples showed that slow oxidation of the MLM surface could occur." @default.
- W2089387780 created "2016-06-24" @default.
- W2089387780 creator A5007241220 @default.
- W2089387780 creator A5032100544 @default.
- W2089387780 creator A5052051159 @default.
- W2089387780 creator A5065978447 @default.
- W2089387780 creator A5066501309 @default.
- W2089387780 date "2001-08-20" @default.
- W2089387780 modified "2023-09-24" @default.
- W2089387780 title "<title>Use of molecular oxygen to reduce EUV-induced carbon contamination of optics</title>" @default.
- W2089387780 doi "https://doi.org/10.1117/12.436677" @default.
- W2089387780 hasPublicationYear "2001" @default.
- W2089387780 type Work @default.
- W2089387780 sameAs 2089387780 @default.
- W2089387780 citedByCount "26" @default.
- W2089387780 countsByYear W20893877802012 @default.
- W2089387780 countsByYear W20893877802013 @default.
- W2089387780 countsByYear W20893877802016 @default.
- W2089387780 countsByYear W20893877802019 @default.
- W2089387780 countsByYear W20893877802021 @default.
- W2089387780 countsByYear W20893877802022 @default.
- W2089387780 crossrefType "proceedings-article" @default.
- W2089387780 hasAuthorship W2089387780A5007241220 @default.
- W2089387780 hasAuthorship W2089387780A5032100544 @default.
- W2089387780 hasAuthorship W2089387780A5052051159 @default.
- W2089387780 hasAuthorship W2089387780A5065978447 @default.
- W2089387780 hasAuthorship W2089387780A5066501309 @default.
- W2089387780 hasConcept C104779481 @default.
- W2089387780 hasConcept C107872376 @default.
- W2089387780 hasConcept C113196181 @default.
- W2089387780 hasConcept C120665830 @default.
- W2089387780 hasConcept C121332964 @default.
- W2089387780 hasConcept C140205800 @default.
- W2089387780 hasConcept C146024833 @default.
- W2089387780 hasConcept C151730666 @default.
- W2089387780 hasConcept C159985019 @default.
- W2089387780 hasConcept C162996421 @default.
- W2089387780 hasConcept C171250308 @default.
- W2089387780 hasConcept C178790620 @default.
- W2089387780 hasConcept C185544564 @default.
- W2089387780 hasConcept C185592680 @default.
- W2089387780 hasConcept C19067145 @default.
- W2089387780 hasConcept C192562407 @default.
- W2089387780 hasConcept C22423302 @default.
- W2089387780 hasConcept C25442681 @default.
- W2089387780 hasConcept C2816523 @default.
- W2089387780 hasConcept C520434653 @default.
- W2089387780 hasConcept C540031477 @default.
- W2089387780 hasConcept C64297162 @default.
- W2089387780 hasConcept C86803240 @default.
- W2089387780 hasConceptScore W2089387780C104779481 @default.
- W2089387780 hasConceptScore W2089387780C107872376 @default.
- W2089387780 hasConceptScore W2089387780C113196181 @default.
- W2089387780 hasConceptScore W2089387780C120665830 @default.
- W2089387780 hasConceptScore W2089387780C121332964 @default.
- W2089387780 hasConceptScore W2089387780C140205800 @default.
- W2089387780 hasConceptScore W2089387780C146024833 @default.
- W2089387780 hasConceptScore W2089387780C151730666 @default.
- W2089387780 hasConceptScore W2089387780C159985019 @default.
- W2089387780 hasConceptScore W2089387780C162996421 @default.
- W2089387780 hasConceptScore W2089387780C171250308 @default.
- W2089387780 hasConceptScore W2089387780C178790620 @default.
- W2089387780 hasConceptScore W2089387780C185544564 @default.
- W2089387780 hasConceptScore W2089387780C185592680 @default.
- W2089387780 hasConceptScore W2089387780C19067145 @default.
- W2089387780 hasConceptScore W2089387780C192562407 @default.
- W2089387780 hasConceptScore W2089387780C22423302 @default.
- W2089387780 hasConceptScore W2089387780C25442681 @default.
- W2089387780 hasConceptScore W2089387780C2816523 @default.
- W2089387780 hasConceptScore W2089387780C520434653 @default.
- W2089387780 hasConceptScore W2089387780C540031477 @default.
- W2089387780 hasConceptScore W2089387780C64297162 @default.
- W2089387780 hasConceptScore W2089387780C86803240 @default.
- W2089387780 hasLocation W20893877801 @default.
- W2089387780 hasOpenAccess W2089387780 @default.
- W2089387780 hasPrimaryLocation W20893877801 @default.
- W2089387780 hasRelatedWork W1967605359 @default.
- W2089387780 hasRelatedWork W1968293950 @default.
- W2089387780 hasRelatedWork W1984110979 @default.
- W2089387780 hasRelatedWork W1993630157 @default.
- W2089387780 hasRelatedWork W2013123477 @default.
- W2089387780 hasRelatedWork W2039674903 @default.
- W2089387780 hasRelatedWork W2052079200 @default.
- W2089387780 hasRelatedWork W2062251108 @default.
- W2089387780 hasRelatedWork W2739897672 @default.
- W2089387780 hasRelatedWork W3098523666 @default.
- W2089387780 isParatext "false" @default.
- W2089387780 isRetracted "false" @default.
- W2089387780 magId "2089387780" @default.
- W2089387780 workType "article" @default.