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- W2089610073 abstract "Three interface state density (Dit) characterization methods to evaluate the oxide-semiconductor interface on metal-oxide-semiconductor capacitors fabricated on GaN are compared and discussed. Capacitance-voltage, conductance-voltage, and constant capacitance deep level transient and optical spectroscopy measurements are used to evaluate Dit at the Al2O3/GaN interface. The effect of annealing ambient on the Pd/Al2O3/GaN capacitors is also examined. Forming gas annealing reduces Dit; nitrogen annealing increases Dit for the annealing conditions tested. The Dit variation correlates with changes in hydrogen concentration at the Al2O3/GaN interface detected by secondary ion mass spectrometry suggesting that hydrogen plays an important role passivating Al2O3/GaN interfaces." @default.
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- W2089610073 date "2013-11-11" @default.
- W2089610073 modified "2023-09-23" @default.
- W2089610073 title "Interface trap evaluation of Pd/Al<sub>2</sub>O<sub>3</sub>/GaN metal oxide semiconductor capacitors and the influence of near-interface hydrogen" @default.
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- W2089610073 doi "https://doi.org/10.1063/1.4827102" @default.
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