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• W2089633586 abstract "The fracture strength of Al2O3 membranes deposited by atomic layer deposition at 110, 150, 200, and 300 °C was investigated. The fracture strength was found to be in the range of 2.25–3.00 GPa using Weibull statistics and nearly constant as a function of deposition temperature. This strength is superior to common microelectromechanical systems materials such as diamondlike carbon, SiO2, or SiC. As-deposited membranes sustained high cycling pressure loads &gt;10 bar/s without fracture. Films featured, however, significant reduction in the resistance to failure after annealing (800 °C) or high humidity (95%, 60 °C) treatments." @default.
• W2089633586 created "2016-06-24" @default.
• W2089633586 creator A5000216401 @default.
• W2089633586 creator A5006379230 @default.
• W2089633586 creator A5006834180 @default.
• W2089633586 creator A5036287025 @default.
• W2089633586 creator A5077636907 @default.
• W2089633586 creator A5085474174 @default.
• W2089633586 date "2014-08-25" @default.
• W2089633586 modified "2023-09-26" @default.
• W2089633586 title "Fracture properties of atomic layer deposited aluminum oxide free-standing membranes" @default.
• W2089633586 cites W1584532517 @default.
• W2089633586 cites W1601110868 @default.
• W2089633586 cites W1653346437 @default.
• W2089633586 cites W1742827642 @default.
• W2089633586 cites W1968512146 @default.
• W2089633586 cites W1970028970 @default.
• W2089633586 cites W1972773417 @default.
• W2089633586 cites W1980065550 @default.
• W2089633586 cites W1988901511 @default.
• W2089633586 cites W1990482422 @default.
• W2089633586 cites W1996942787 @default.
• W2089633586 cites W1997904336 @default.
• W2089633586 cites W1998277068 @default.
• W2089633586 cites W2006856682 @default.
• W2089633586 cites W2013901062 @default.
• W2089633586 cites W2017173496 @default.
• W2089633586 cites W2017612055 @default.
• W2089633586 cites W2022168868 @default.
• W2089633586 cites W2027168542 @default.
• W2089633586 cites W2030722553 @default.
• W2089633586 cites W2035704191 @default.
• W2089633586 cites W2035931858 @default.
• W2089633586 cites W2041080543 @default.
• W2089633586 cites W2055546922 @default.
• W2089633586 cites W2068298698 @default.
• W2089633586 cites W2070146300 @default.
• W2089633586 cites W2074977974 @default.
• W2089633586 cites W2087539540 @default.
• W2089633586 cites W2093418857 @default.
• W2089633586 cites W2094629190 @default.
• W2089633586 cites W2096377642 @default.
• W2089633586 cites W2097772002 @default.
• W2089633586 cites W2106400214 @default.
• W2089633586 cites W2136371731 @default.
• W2089633586 cites W2136594141 @default.
• W2089633586 cites W2157424496 @default.
• W2089633586 cites W2327190127 @default.
• W2089633586 cites W51287235 @default.
• W2089633586 cites W80716004 @default.
• W2089633586 doi "https://doi.org/10.1116/1.4893769" @default.
• W2089633586 hasPublicationYear "2014" @default.
• W2089633586 type Work @default.
• W2089633586 sameAs 2089633586 @default.
• W2089633586 citedByCount "15" @default.
• W2089633586 countsByYear W20896335862015 @default.
• W2089633586 countsByYear W20896335862016 @default.
• W2089633586 countsByYear W20896335862017 @default.
• W2089633586 countsByYear W20896335862018 @default.
• W2089633586 countsByYear W20896335862020 @default.
• W2089633586 countsByYear W20896335862021 @default.
• W2089633586 countsByYear W20896335862023 @default.
• W2089633586 crossrefType "journal-article" @default.
• W2089633586 hasAuthorship W2089633586A5000216401 @default.
• W2089633586 hasAuthorship W2089633586A5006379230 @default.
• W2089633586 hasAuthorship W2089633586A5006834180 @default.
• W2089633586 hasAuthorship W2089633586A5036287025 @default.
• W2089633586 hasAuthorship W2089633586A5077636907 @default.
• W2089633586 hasAuthorship W2089633586A5085474174 @default.
• W2089633586 hasBestOaLocation W20896335862 @default.
• W2089633586 hasConcept C159985019 @default.
• W2089633586 hasConcept C178405089 @default.
• W2089633586 hasConcept C185592680 @default.
• W2089633586 hasConcept C191897082 @default.
• W2089633586 hasConcept C192562407 @default.
• W2089633586 hasConcept C2777855556 @default.
• W2089633586 hasConcept C2779227376 @default.
• W2089633586 hasConcept C2779851234 @default.
• W2089633586 hasConcept C2910700394 @default.
• W2089633586 hasConcept C41625074 @default.
• W2089633586 hasConcept C43369102 @default.
• W2089633586 hasConcept C513153333 @default.
• W2089633586 hasConcept C55493867 @default.
• W2089633586 hasConcept C69544855 @default.
• W2089633586 hasConceptScore W2089633586C159985019 @default.
• W2089633586 hasConceptScore W2089633586C178405089 @default.
• W2089633586 hasConceptScore W2089633586C185592680 @default.
• W2089633586 hasConceptScore W2089633586C191897082 @default.
• W2089633586 hasConceptScore W2089633586C192562407 @default.
• W2089633586 hasConceptScore W2089633586C2777855556 @default.
• W2089633586 hasConceptScore W2089633586C2779227376 @default.
• W2089633586 hasConceptScore W2089633586C2779851234 @default.
• W2089633586 hasConceptScore W2089633586C2910700394 @default.
• W2089633586 hasConceptScore W2089633586C41625074 @default.
• W2089633586 hasConceptScore W2089633586C43369102 @default.
• W2089633586 hasConceptScore W2089633586C513153333 @default.
• W2089633586 hasConceptScore W2089633586C55493867 @default.
• W2089633586 hasConceptScore W2089633586C69544855 @default.
• W2089633586 hasIssue "1" @default.
• W2089633586 hasLocation W20896335861 @default.

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