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- W2089780935 abstract "The general principles of operation of passive and active pyrometry methods are considered. The usefulness of ratio, multi-ratio, approximation, and enhanced emissivity methods to unknown and changing emissivity situations is analyzed. A spectral functional for the emissivity is postulated to give the theoretical limit of accuracy of any passive method. A novel passive-active method, with accuracy better than 1 percent, for semiconductor wafer measurement is described and demonstrated through on-line measurement in Rapid Thermal Chemical Vapor Deposition process." @default.
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- W2089780935 date "1999-04-27" @default.
- W2089780935 modified "2023-09-27" @default.
- W2089780935 title "Theoretical and practical aspects of remote temperature measurement in semiconductor manufacturing" @default.
- W2089780935 doi "https://doi.org/10.1117/12.346914" @default.
- W2089780935 hasPublicationYear "1999" @default.
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