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- W2089848481 abstract "Recent advances in multilayer mirror technology meet many of the stringent demands of soft-x-ray projection lithography (SXPL). The maximum normal-incidence reflectivity achieved to date is 66% for Mo/Si multilayers at a soft-x-ray wavelength of 13.4 am, which is sufficient to satisfy the x-ray throughput requirements of SXPL. These high-performance coatings can be deposited on figured optics with layer thickness control of ˜ 0.5%. Uniform multilayer coatings are required for SXPL imaging optics, for which maintaining the surface figure is critical to achieving diffraction-limited performance. In contrast the coatings on the condenser optics will be graded to accommodate a large range of angles of incidence. Graded multilayer coatings can also be used to modify the figure of optical substrates without increasing the surface roughness. This offers a potential method for precise fabrication of aspheric imaging optics." @default.
- W2089848481 created "2016-06-24" @default.
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- W2089848481 date "1993-12-01" @default.
- W2089848481 modified "2023-09-30" @default.
- W2089848481 title "Multilayer mirror technology for soft-x-ray projection lithography" @default.
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- W2089848481 doi "https://doi.org/10.1364/ao.32.006952" @default.
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