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- W2089923963 abstract "In this paper, an FIB method using progressive multi-cut technique is proposed and it has been applied in failure analysis of wafer fabrication. The application results showed that this method would greatly improve FIB cut success rate, especially for invisible defects. A case study on Vbd ramp up failure after QBD short loop will be presented." @default.
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- W2089923963 date "2006-11-01" @default.
- W2089923963 modified "2023-09-22" @default.
- W2089923963 title "An FIB Method Using Progressive Multi-Cut Technique & Application in Failure Analysis of Wafer Fabrication" @default.
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- W2089923963 doi "https://doi.org/10.1109/smelec.2006.380700" @default.
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