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- W2089968267 abstract "A novel process for fabricating x-ray masks of submicron gold patterns using a copper plating base is presented and discussed in detail. In the E-beam writing of x-ray masks, the trilevel resist layers and the metal layer for x-ray absorber patterning cause a proximity effect which determines the masks' resolution. Based on E-beam simulations and experimental results, copper plating base is selected as the best metal-layer material to reduce the above effect. To fabricate submicron gold patterns on the copper base, two gold-electroplating steps are newly introduced. These are strike plating and pulse-current plating. Stress change in the plated gold and positional accuracy changes are also measured throughout the heating process. Finally, sequential steps for the fabrication of x-ray masks with plating base are shown." @default.
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- W2089968267 date "1988-06-14" @default.
- W2089968267 modified "2023-09-23" @default.
- W2089968267 title "Novel Process For Fabricating Low Distortion X-Ray Masks Of Submicron Gold Patterns" @default.
- W2089968267 doi "https://doi.org/10.1117/12.945649" @default.
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