Matches in SemOpenAlex for { <https://semopenalex.org/work/W2089984499> ?p ?o ?g. }
- W2089984499 endingPage "1455" @default.
- W2089984499 startingPage "1449" @default.
- W2089984499 abstract "The AFM-technology has undergone tremendous development during the past decade. This review is devoted to the realization of piezoresistive sensors used in scanning probe microscopy at University of Kassel. It is expected that in the near future major technological breakthroughs in scanning proximal probe nanotools will allow for key scientific impact on analysis and synthesis of nanostructures. All the piezoresistive cantilever sensors described here are based on advanced silicon micromachining and standard CMOS processing. Moreover, using a newly optimized piezoresistive detection scheme process comprising a Wheatstone bridge, we have designed and fabricated piezoresistive cantilevers for atomic force microscopy, which improve surface topography resolution by an order of magnitude to 0.1 nm. The elegance of this concept is that by using an almost identical detection principle and differently functionalized tips or cantilever surfaces, we can detect subtle sample interactions (mechanical, electrical, thermal, and chemical) with a significantly more compact system than with optical beam deflection techniques. For non-contact scanning force microscopy, we integrate a thermally driven bimorph actuator with the piezoresistive cantilever and make use of direct-oscillation in a higher flexural mode. The cantilever then operates in the phase shift atomic force microscopy (AFM) detection technique." @default.
- W2089984499 created "2016-06-24" @default.
- W2089984499 creator A5057705318 @default.
- W2089984499 date "2006-04-01" @default.
- W2089984499 modified "2023-10-14" @default.
- W2089984499 title "Scanning proximity probes for nanoscience and nanofabrication" @default.
- W2089984499 cites W1964464612 @default.
- W2089984499 cites W1965692061 @default.
- W2089984499 cites W1966065129 @default.
- W2089984499 cites W1998258166 @default.
- W2089984499 cites W2000465277 @default.
- W2089984499 cites W2002257666 @default.
- W2089984499 cites W2011419454 @default.
- W2089984499 cites W2020845563 @default.
- W2089984499 cites W2045147185 @default.
- W2089984499 cites W2059400675 @default.
- W2089984499 cites W2069572181 @default.
- W2089984499 cites W2071810680 @default.
- W2089984499 cites W2076210646 @default.
- W2089984499 cites W2076287137 @default.
- W2089984499 cites W2092631644 @default.
- W2089984499 cites W2139212790 @default.
- W2089984499 cites W2146343360 @default.
- W2089984499 doi "https://doi.org/10.1016/j.mee.2006.01.199" @default.
- W2089984499 hasPublicationYear "2006" @default.
- W2089984499 type Work @default.
- W2089984499 sameAs 2089984499 @default.
- W2089984499 citedByCount "28" @default.
- W2089984499 countsByYear W20899844992012 @default.
- W2089984499 countsByYear W20899844992014 @default.
- W2089984499 countsByYear W20899844992015 @default.
- W2089984499 countsByYear W20899844992016 @default.
- W2089984499 countsByYear W20899844992017 @default.
- W2089984499 countsByYear W20899844992018 @default.
- W2089984499 countsByYear W20899844992019 @default.
- W2089984499 countsByYear W20899844992020 @default.
- W2089984499 countsByYear W20899844992022 @default.
- W2089984499 crossrefType "journal-article" @default.
- W2089984499 hasAuthorship W2089984499A5057705318 @default.
- W2089984499 hasConcept C100082104 @default.
- W2089984499 hasConcept C102951782 @default.
- W2089984499 hasConcept C104713690 @default.
- W2089984499 hasConcept C119599485 @default.
- W2089984499 hasConcept C127413603 @default.
- W2089984499 hasConcept C136525101 @default.
- W2089984499 hasConcept C137488568 @default.
- W2089984499 hasConcept C141354745 @default.
- W2089984499 hasConcept C142724271 @default.
- W2089984499 hasConcept C159985019 @default.
- W2089984499 hasConcept C162117346 @default.
- W2089984499 hasConcept C165801399 @default.
- W2089984499 hasConcept C171250308 @default.
- W2089984499 hasConcept C192562407 @default.
- W2089984499 hasConcept C198490522 @default.
- W2089984499 hasConcept C204787440 @default.
- W2089984499 hasConcept C206008964 @default.
- W2089984499 hasConcept C2776907800 @default.
- W2089984499 hasConcept C2778393539 @default.
- W2089984499 hasConcept C36628996 @default.
- W2089984499 hasConcept C49040817 @default.
- W2089984499 hasConcept C544956773 @default.
- W2089984499 hasConcept C71924100 @default.
- W2089984499 hasConceptScore W2089984499C100082104 @default.
- W2089984499 hasConceptScore W2089984499C102951782 @default.
- W2089984499 hasConceptScore W2089984499C104713690 @default.
- W2089984499 hasConceptScore W2089984499C119599485 @default.
- W2089984499 hasConceptScore W2089984499C127413603 @default.
- W2089984499 hasConceptScore W2089984499C136525101 @default.
- W2089984499 hasConceptScore W2089984499C137488568 @default.
- W2089984499 hasConceptScore W2089984499C141354745 @default.
- W2089984499 hasConceptScore W2089984499C142724271 @default.
- W2089984499 hasConceptScore W2089984499C159985019 @default.
- W2089984499 hasConceptScore W2089984499C162117346 @default.
- W2089984499 hasConceptScore W2089984499C165801399 @default.
- W2089984499 hasConceptScore W2089984499C171250308 @default.
- W2089984499 hasConceptScore W2089984499C192562407 @default.
- W2089984499 hasConceptScore W2089984499C198490522 @default.
- W2089984499 hasConceptScore W2089984499C204787440 @default.
- W2089984499 hasConceptScore W2089984499C206008964 @default.
- W2089984499 hasConceptScore W2089984499C2776907800 @default.
- W2089984499 hasConceptScore W2089984499C2778393539 @default.
- W2089984499 hasConceptScore W2089984499C36628996 @default.
- W2089984499 hasConceptScore W2089984499C49040817 @default.
- W2089984499 hasConceptScore W2089984499C544956773 @default.
- W2089984499 hasConceptScore W2089984499C71924100 @default.
- W2089984499 hasIssue "4-9" @default.
- W2089984499 hasLocation W20899844991 @default.
- W2089984499 hasOpenAccess W2089984499 @default.
- W2089984499 hasPrimaryLocation W20899844991 @default.
- W2089984499 hasRelatedWork W1976055454 @default.
- W2089984499 hasRelatedWork W1993974117 @default.
- W2089984499 hasRelatedWork W1994582615 @default.
- W2089984499 hasRelatedWork W2045008932 @default.
- W2089984499 hasRelatedWork W2057715624 @default.
- W2089984499 hasRelatedWork W2068408476 @default.
- W2089984499 hasRelatedWork W2080287479 @default.
- W2089984499 hasRelatedWork W2089984499 @default.
- W2089984499 hasRelatedWork W2495295603 @default.