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- W2089999144 abstract "Surface parameters play an important if not dominant role in limiting the performance of many semiconductor devices. The research effort which has been directed toward semiconductor surfaces in recent years has greatly improved our understanding of oxidized silicon and has provided a logical basis for modern semiconductor processing techniques. Relevant surface phenomena include contamination and imperfections in the oxide layer, impurity redistribution in the silicon near the oxide, and additional electronic states at the oxide-silicon interface. The successes of the MOS method of surface characterization will be reviewed." @default.
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- W2089999144 title "Oxidized Silicon Surface" @default.
- W2089999144 doi "https://doi.org/10.1116/1.1316371" @default.
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