FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090146895> ?p ?o ?g. }

• W2090146895 endingPage "226" @default.
• W2090146895 startingPage "219" @default.
• W2090146895 abstract "The ion-beam-induced chemical vapor deposition method for the preparation of thin films consists of the bombardment of a suitable substrate with O or N ions of relatively high energy while a flow of an organometallic precursor is directed onto its surface. Single and mixed oxides and nitride thin films can be prepared by this procedure. This paper describes the principles of the method, and presents some examples of thin films prepared with it (TiO2, PbTiO3, AlxTiyOz, AlN, and SnO2). Some characterization results of these thin films by different techniques are reported, with special emphasis on physical and electronic methods such as X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (EELS), and X-ray absorption spectroscopy (XAS). Other aspects, such as the preferential removal of C, H, and other impurity atoms from the precursors under the action of oxygen beams, or the possibility of performing lithographic depositions of these dielectric materials, are also considered." @default.
• W2090146895 created "2016-06-24" @default.
• W2090146895 creator A5000905216 @default.
• W2090146895 creator A5002895267 @default.
• W2090146895 creator A5008074373 @default.
• W2090146895 creator A5009648215 @default.
• W2090146895 creator A5016766156 @default.
• W2090146895 creator A5044251966 @default.
• W2090146895 creator A5064359130 @default.
• W2090146895 creator A5083074838 @default.
• W2090146895 date "1997-08-01" @default.
• W2090146895 modified "2023-10-18" @default.
• W2090146895 title "Ion-Beam-Induced CVD: An Alternative Method of Thin Film Preparation" @default.
• W2090146895 cites W1991081333 @default.
• W2090146895 cites W2007028246 @default.
• W2090146895 cites W2009943871 @default.
• W2090146895 cites W2018640624 @default.
• W2090146895 cites W2023403804 @default.
• W2090146895 cites W2023844597 @default.
• W2090146895 cites W2025297303 @default.
• W2090146895 cites W2027238334 @default.
• W2090146895 cites W2032206434 @default.
• W2090146895 cites W2040508734 @default.
• W2090146895 cites W2043239745 @default.
• W2090146895 cites W2045134972 @default.
• W2090146895 cites W2045877506 @default.
• W2090146895 cites W2054116853 @default.
• W2090146895 cites W2063649630 @default.
• W2090146895 cites W2077434306 @default.
• W2090146895 cites W2094808218 @default.
• W2090146895 cites W2138509612 @default.
• W2090146895 cites W2141399311 @default.
• W2090146895 cites W2147950654 @default.
• W2090146895 cites W2149632715 @default.
• W2090146895 cites W2172038939 @default.
• W2090146895 doi "https://doi.org/10.1002/cvde.19970030410" @default.
• W2090146895 hasPublicationYear "1997" @default.
• W2090146895 type Work @default.
• W2090146895 sameAs 2090146895 @default.
• W2090146895 citedByCount "27" @default.
• W2090146895 countsByYear W20901468952013 @default.
• W2090146895 countsByYear W20901468952015 @default.
• W2090146895 countsByYear W20901468952018 @default.
• W2090146895 countsByYear W20901468952021 @default.
• W2090146895 countsByYear W20901468952022 @default.
• W2090146895 crossrefType "journal-article" @default.
• W2090146895 hasAuthorship W2090146895A5000905216 @default.
• W2090146895 hasAuthorship W2090146895A5002895267 @default.
• W2090146895 hasAuthorship W2090146895A5008074373 @default.
• W2090146895 hasAuthorship W2090146895A5009648215 @default.
• W2090146895 hasAuthorship W2090146895A5016766156 @default.
• W2090146895 hasAuthorship W2090146895A5044251966 @default.
• W2090146895 hasAuthorship W2090146895A5064359130 @default.
• W2090146895 hasAuthorship W2090146895A5083074838 @default.
• W2090146895 hasConcept C111368507 @default.
• W2090146895 hasConcept C113196181 @default.
• W2090146895 hasConcept C119824511 @default.
• W2090146895 hasConcept C120665830 @default.
• W2090146895 hasConcept C121332964 @default.
• W2090146895 hasConcept C127313418 @default.
• W2090146895 hasConcept C127413603 @default.
• W2090146895 hasConcept C145148216 @default.
• W2090146895 hasConcept C171250308 @default.
• W2090146895 hasConcept C175708663 @default.
• W2090146895 hasConcept C178790620 @default.
• W2090146895 hasConcept C185592680 @default.
• W2090146895 hasConcept C19067145 @default.
• W2090146895 hasConcept C192562407 @default.
• W2090146895 hasConcept C194760766 @default.
• W2090146895 hasConcept C2777289219 @default.
• W2090146895 hasConcept C2779227376 @default.
• W2090146895 hasConcept C32891209 @default.
• W2090146895 hasConcept C33893257 @default.
• W2090146895 hasConcept C42360764 @default.
• W2090146895 hasConcept C50774322 @default.
• W2090146895 hasConcept C51576277 @default.
• W2090146895 hasConcept C57410435 @default.
• W2090146895 hasConcept C62284982 @default.
• W2090146895 hasConcept C62520636 @default.
• W2090146895 hasConcept C7770020 @default.
• W2090146895 hasConceptScore W2090146895C111368507 @default.
• W2090146895 hasConceptScore W2090146895C113196181 @default.
• W2090146895 hasConceptScore W2090146895C119824511 @default.
• W2090146895 hasConceptScore W2090146895C120665830 @default.
• W2090146895 hasConceptScore W2090146895C121332964 @default.
• W2090146895 hasConceptScore W2090146895C127313418 @default.
• W2090146895 hasConceptScore W2090146895C127413603 @default.
• W2090146895 hasConceptScore W2090146895C145148216 @default.
• W2090146895 hasConceptScore W2090146895C171250308 @default.
• W2090146895 hasConceptScore W2090146895C175708663 @default.
• W2090146895 hasConceptScore W2090146895C178790620 @default.
• W2090146895 hasConceptScore W2090146895C185592680 @default.
• W2090146895 hasConceptScore W2090146895C19067145 @default.
• W2090146895 hasConceptScore W2090146895C192562407 @default.
• W2090146895 hasConceptScore W2090146895C194760766 @default.
• W2090146895 hasConceptScore W2090146895C2777289219 @default.
• W2090146895 hasConceptScore W2090146895C2779227376 @default.
• W2090146895 hasConceptScore W2090146895C32891209 @default.

• next