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- W2090147417 endingPage "420" @default.
- W2090147417 startingPage "420" @default.
- W2090147417 abstract "Earlier work has clearly shown that only a very few tools are able to measure reliably sheet resistances on advanced complementary metal-oxide semiconductor (CMOS) structures. One of these promising techniques is the junction photovoltage based technique, which uses a modulated light emitting diode to generate, in a millimeter size area of a single junction isolated structure, excess carriers which are separated by the underlying electrical field, and subsequently outdiffuse laterally. From the lateral variation in junction photovoltage, one can extract in a noncontact way the sheet resistance (Rs) of the top layer and the junction leakage (L) of the junction. First, a simplified theoretical solution of the underlying diffusion equations will be presented. Next, a recently developed simulation framework will be discussed, combining the SCILAB environment with SYNOPSIS∕MEDICI device simulations, allowing for the detailed study of both ideal (in agreement with the theoretical solution) and less ideal advanced CMOS structures. Using this simulation framework, new insights will be proposed relating to the capability of RsL to characterize the impact of the presence of oxide charges on the accuracy of the measurements, and the relevance of the RsL leakage value for the actual diode (device) reverse bias characteristics in the presence of an underlying halo∕well implant." @default.
- W2090147417 created "2016-06-24" @default.
- W2090147417 creator A5013590239 @default.
- W2090147417 creator A5049003157 @default.
- W2090147417 creator A5052932976 @default.
- W2090147417 creator A5072492493 @default.
- W2090147417 creator A5073104842 @default.
- W2090147417 creator A5084900339 @default.
- W2090147417 creator A5088335671 @default.
- W2090147417 date "2008-01-01" @default.
- W2090147417 modified "2023-09-26" @default.
- W2090147417 title "Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor" @default.
- W2090147417 cites W2068394911 @default.
- W2090147417 cites W2070993176 @default.
- W2090147417 cites W2074845103 @default.
- W2090147417 cites W2083067130 @default.
- W2090147417 cites W2137118724 @default.
- W2090147417 doi "https://doi.org/10.1116/1.2805251" @default.
- W2090147417 hasPublicationYear "2008" @default.
- W2090147417 type Work @default.
- W2090147417 sameAs 2090147417 @default.
- W2090147417 citedByCount "5" @default.
- W2090147417 countsByYear W20901474172012 @default.
- W2090147417 crossrefType "journal-article" @default.
- W2090147417 hasAuthorship W2090147417A5013590239 @default.
- W2090147417 hasAuthorship W2090147417A5049003157 @default.
- W2090147417 hasAuthorship W2090147417A5052932976 @default.
- W2090147417 hasAuthorship W2090147417A5072492493 @default.
- W2090147417 hasAuthorship W2090147417A5073104842 @default.
- W2090147417 hasAuthorship W2090147417A5084900339 @default.
- W2090147417 hasAuthorship W2090147417A5088335671 @default.
- W2090147417 hasConcept C108225325 @default.
- W2090147417 hasConcept C121332964 @default.
- W2090147417 hasConcept C127413603 @default.
- W2090147417 hasConcept C129396577 @default.
- W2090147417 hasConcept C171250308 @default.
- W2090147417 hasConcept C191897082 @default.
- W2090147417 hasConcept C192562407 @default.
- W2090147417 hasConcept C24326235 @default.
- W2090147417 hasConcept C2779227376 @default.
- W2090147417 hasConcept C2779851234 @default.
- W2090147417 hasConcept C32891209 @default.
- W2090147417 hasConcept C40786966 @default.
- W2090147417 hasConcept C46362747 @default.
- W2090147417 hasConcept C49040817 @default.
- W2090147417 hasConcept C62520636 @default.
- W2090147417 hasConcept C62628764 @default.
- W2090147417 hasConcept C66825105 @default.
- W2090147417 hasConcept C78434282 @default.
- W2090147417 hasConcept C79635011 @default.
- W2090147417 hasConceptScore W2090147417C108225325 @default.
- W2090147417 hasConceptScore W2090147417C121332964 @default.
- W2090147417 hasConceptScore W2090147417C127413603 @default.
- W2090147417 hasConceptScore W2090147417C129396577 @default.
- W2090147417 hasConceptScore W2090147417C171250308 @default.
- W2090147417 hasConceptScore W2090147417C191897082 @default.
- W2090147417 hasConceptScore W2090147417C192562407 @default.
- W2090147417 hasConceptScore W2090147417C24326235 @default.
- W2090147417 hasConceptScore W2090147417C2779227376 @default.
- W2090147417 hasConceptScore W2090147417C2779851234 @default.
- W2090147417 hasConceptScore W2090147417C32891209 @default.
- W2090147417 hasConceptScore W2090147417C40786966 @default.
- W2090147417 hasConceptScore W2090147417C46362747 @default.
- W2090147417 hasConceptScore W2090147417C49040817 @default.
- W2090147417 hasConceptScore W2090147417C62520636 @default.
- W2090147417 hasConceptScore W2090147417C62628764 @default.
- W2090147417 hasConceptScore W2090147417C66825105 @default.
- W2090147417 hasConceptScore W2090147417C78434282 @default.
- W2090147417 hasConceptScore W2090147417C79635011 @default.
- W2090147417 hasIssue "1" @default.
- W2090147417 hasLocation W20901474171 @default.
- W2090147417 hasOpenAccess W2090147417 @default.
- W2090147417 hasPrimaryLocation W20901474171 @default.
- W2090147417 hasRelatedWork W2081914540 @default.
- W2090147417 hasRelatedWork W2085286510 @default.
- W2090147417 hasRelatedWork W2090147417 @default.
- W2090147417 hasRelatedWork W2132585519 @default.
- W2090147417 hasRelatedWork W2393945053 @default.
- W2090147417 hasRelatedWork W2423659009 @default.
- W2090147417 hasRelatedWork W3009334166 @default.
- W2090147417 hasRelatedWork W3143115910 @default.
- W2090147417 hasRelatedWork W40142070 @default.
- W2090147417 hasRelatedWork W2181152028 @default.
- W2090147417 hasVolume "26" @default.
- W2090147417 isParatext "false" @default.
- W2090147417 isRetracted "false" @default.
- W2090147417 magId "2090147417" @default.
- W2090147417 workType "article" @default.