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- W2090230245 abstract "Abstract Carbon delta-doping GaAs superlattices incorporating 50 layers have been grown by chemical beam epitaxy (CBE) with or without interrupting the triethylgallium (TEGa) flux during exposure of the surface to CBr 4 to effect the doping. Infrared localized vibrational mode (LVM) spectroscopy showed that the carbon was incorporated on the As sublattice and high-resolution X-ray diffractometry (HRXD) was used to measure the strain in the layers. For the sample doped during TEGa flux interruption more than 6 orders of satellite peaks were observed on either side of the average layer peak. Simulation of the HRXD profile using dynamical diffraction theory showed that the δ-doped layers were about 5 A thick with a carbon concentration of 2.9 × 10 20 cm −3 . Electrochemical capacitance-voltage profiling of this structure gave a peak concentration of 2 × 10 19 cm −13 with a width of 27 A, which corresponds to the limit of spatial resolution for this technique." @default.
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- W2090230245 date "1996-07-01" @default.
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- W2090230245 title "Characterization of carbon delta-doping GaAs superlattices grown by chemical beam epitaxy using CBr4" @default.
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- W2090230245 doi "https://doi.org/10.1016/0022-0248(96)00034-6" @default.
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