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• W2090269216 endingPage "L994" @default.
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• W2090269216 abstract "Fusion-bonded silicon wafers exhibit a superstructure at their common interface due to the spatial beating of the two crystal lattices. The superstructure consists of a network of screw dislocations with a period determined by the twist angle θ. By synchrotron X-ray diffraction, the periodic elastic modulation in the two crystals resulting from the dislocation network has been measured. The characteristic thickness of the modulated region is found to be inversely proportional to θ, reaching over 160 Å for θ=0.4°. This behavior is reproduced in numerical simulations of the elastic modulation." @default.
• W2090269216 created "2016-06-24" @default.
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• W2090269216 date "1999-11-01" @default.
• W2090269216 modified "2023-10-16" @default.
• W2090269216 title "The interface structure in directly bonded silicon crystals studied by synchrotron X-ray diffraction" @default.
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• W2090269216 doi "https://doi.org/10.1016/s0039-6028(99)00942-5" @default.
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