Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090364749> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2090364749 endingPage "C6M11" @default.
- W2090364749 startingPage "C6M7" @default.
- W2090364749 abstract "Imprint lithography has been shown to be an effective technique for the replication of nanoscale features. Acceptance of imprint lithography for manufacturing will require a demonstration of defect levels commensurate with cost-effective device production. This article summarizes the results of defect inspections of hard disks patterned using jet and flash imprint lithography (J-FIL™). This work presents a methodology for automated pattern inspection and defect classification for imprint-patterned media. Candela CS20 and 6120 tools from KLA-Tencor map the optical properties of the disk surface, producing high-resolution grayscale images of surface reflectivity and scattered light. Defects that have been identified in this manner are further characterized according to the morphology. The imprint process was tested after optimizing both the disk cleaning and adhesion layer processes that precede imprinting. Two extended imprint runs were performed and both the defect types and trends are reported." @default.
- W2090364749 created "2016-06-24" @default.
- W2090364749 creator A5001108426 @default.
- W2090364749 creator A5004012415 @default.
- W2090364749 creator A5017838982 @default.
- W2090364749 creator A5039939771 @default.
- W2090364749 creator A5043145637 @default.
- W2090364749 creator A5045851942 @default.
- W2090364749 creator A5062288988 @default.
- W2090364749 creator A5086625452 @default.
- W2090364749 date "2010-10-19" @default.
- W2090364749 modified "2023-09-25" @default.
- W2090364749 title "Defect analysis for patterned media" @default.
- W2090364749 cites W1993402801 @default.
- W2090364749 cites W2046519916 @default.
- W2090364749 cites W2064764112 @default.
- W2090364749 cites W2066321384 @default.
- W2090364749 cites W2072642727 @default.
- W2090364749 cites W2115669216 @default.
- W2090364749 cites W2138409295 @default.
- W2090364749 cites W3161175118 @default.
- W2090364749 doi "https://doi.org/10.1116/1.3498752" @default.
- W2090364749 hasPublicationYear "2010" @default.
- W2090364749 type Work @default.
- W2090364749 sameAs 2090364749 @default.
- W2090364749 citedByCount "6" @default.
- W2090364749 countsByYear W20903647492012 @default.
- W2090364749 countsByYear W20903647492015 @default.
- W2090364749 countsByYear W20903647492016 @default.
- W2090364749 countsByYear W20903647492017 @default.
- W2090364749 crossrefType "journal-article" @default.
- W2090364749 hasAuthorship W2090364749A5001108426 @default.
- W2090364749 hasAuthorship W2090364749A5004012415 @default.
- W2090364749 hasAuthorship W2090364749A5017838982 @default.
- W2090364749 hasAuthorship W2090364749A5039939771 @default.
- W2090364749 hasAuthorship W2090364749A5043145637 @default.
- W2090364749 hasAuthorship W2090364749A5045851942 @default.
- W2090364749 hasAuthorship W2090364749A5062288988 @default.
- W2090364749 hasAuthorship W2090364749A5086625452 @default.
- W2090364749 hasConcept C120665830 @default.
- W2090364749 hasConcept C121332964 @default.
- W2090364749 hasConcept C160633673 @default.
- W2090364749 hasConcept C171250308 @default.
- W2090364749 hasConcept C192562407 @default.
- W2090364749 hasConcept C204223013 @default.
- W2090364749 hasConcept C45206210 @default.
- W2090364749 hasConcept C49040817 @default.
- W2090364749 hasConcept C78201319 @default.
- W2090364749 hasConceptScore W2090364749C120665830 @default.
- W2090364749 hasConceptScore W2090364749C121332964 @default.
- W2090364749 hasConceptScore W2090364749C160633673 @default.
- W2090364749 hasConceptScore W2090364749C171250308 @default.
- W2090364749 hasConceptScore W2090364749C192562407 @default.
- W2090364749 hasConceptScore W2090364749C204223013 @default.
- W2090364749 hasConceptScore W2090364749C45206210 @default.
- W2090364749 hasConceptScore W2090364749C49040817 @default.
- W2090364749 hasConceptScore W2090364749C78201319 @default.
- W2090364749 hasIssue "6" @default.
- W2090364749 hasLocation W20903647491 @default.
- W2090364749 hasOpenAccess W2090364749 @default.
- W2090364749 hasPrimaryLocation W20903647491 @default.
- W2090364749 hasRelatedWork W2001521345 @default.
- W2090364749 hasRelatedWork W2003596345 @default.
- W2090364749 hasRelatedWork W2059743714 @default.
- W2090364749 hasRelatedWork W2078842698 @default.
- W2090364749 hasRelatedWork W2287493395 @default.
- W2090364749 hasRelatedWork W2558757982 @default.
- W2090364749 hasRelatedWork W2596188029 @default.
- W2090364749 hasRelatedWork W2805037689 @default.
- W2090364749 hasRelatedWork W2913182336 @default.
- W2090364749 hasRelatedWork W3101755079 @default.
- W2090364749 hasVolume "28" @default.
- W2090364749 isParatext "false" @default.
- W2090364749 isRetracted "false" @default.
- W2090364749 magId "2090364749" @default.
- W2090364749 workType "article" @default.