Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090460358> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2090460358 endingPage "205" @default.
- W2090460358 startingPage "201" @default.
- W2090460358 abstract "Gallium nitride (GaN) has attracted considerable interest for electronic device applications at high temperature environment with high power conditions. The large lattice mismatch and the large thermal expansion coefficient difference between the GaN film and silicon substrate makes it difficult to get film of high quality and suitable for the metal-oxide-semiconductor (MOS) devices. However, deposited films can be subjected to different fabrication processes to exhibit good electrical characteristics. In this paper, we report on the fabrication and characterization of MOS capacitor based on GaN grown on silicon substrates at low growth temperatures (200 and 600 °C). The roughness, morphology, composition and crystalline quality of the GaN films were determined by atomic force microscopy (AFM), scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and X-ray diffraction (XRD) measurements. The fabricated MOS structures were characterized using capacitance–voltage (C–V) measurements." @default.
- W2090460358 created "2016-06-24" @default.
- W2090460358 creator A5008351836 @default.
- W2090460358 creator A5024758865 @default.
- W2090460358 creator A5031721157 @default.
- W2090460358 creator A5071846561 @default.
- W2090460358 date "2005-08-01" @default.
- W2090460358 modified "2023-09-27" @default.
- W2090460358 title "Electrical characteristics of GaN-based metal-oxide-semiconductor (MOS) structures" @default.
- W2090460358 cites W1902594651 @default.
- W2090460358 cites W2005721487 @default.
- W2090460358 cites W2008180293 @default.
- W2090460358 cites W2026542997 @default.
- W2090460358 cites W2030361654 @default.
- W2090460358 cites W2043519365 @default.
- W2090460358 cites W2056107521 @default.
- W2090460358 cites W2070961166 @default.
- W2090460358 cites W2074998815 @default.
- W2090460358 cites W2092201166 @default.
- W2090460358 doi "https://doi.org/10.1016/j.mee.2005.03.007" @default.
- W2090460358 hasPublicationYear "2005" @default.
- W2090460358 type Work @default.
- W2090460358 sameAs 2090460358 @default.
- W2090460358 citedByCount "4" @default.
- W2090460358 countsByYear W20904603582016 @default.
- W2090460358 crossrefType "journal-article" @default.
- W2090460358 hasAuthorship W2090460358A5008351836 @default.
- W2090460358 hasAuthorship W2090460358A5024758865 @default.
- W2090460358 hasAuthorship W2090460358A5031721157 @default.
- W2090460358 hasAuthorship W2090460358A5071846561 @default.
- W2090460358 hasConcept C108225325 @default.
- W2090460358 hasConcept C111368507 @default.
- W2090460358 hasConcept C127313418 @default.
- W2090460358 hasConcept C136525101 @default.
- W2090460358 hasConcept C142724271 @default.
- W2090460358 hasConcept C159985019 @default.
- W2090460358 hasConcept C171250308 @default.
- W2090460358 hasConcept C191897082 @default.
- W2090460358 hasConcept C192562407 @default.
- W2090460358 hasConcept C204787440 @default.
- W2090460358 hasConcept C26771246 @default.
- W2090460358 hasConcept C2777289219 @default.
- W2090460358 hasConcept C2778871202 @default.
- W2090460358 hasConcept C2779227376 @default.
- W2090460358 hasConcept C2779851234 @default.
- W2090460358 hasConcept C49040817 @default.
- W2090460358 hasConcept C544956773 @default.
- W2090460358 hasConcept C71924100 @default.
- W2090460358 hasConceptScore W2090460358C108225325 @default.
- W2090460358 hasConceptScore W2090460358C111368507 @default.
- W2090460358 hasConceptScore W2090460358C127313418 @default.
- W2090460358 hasConceptScore W2090460358C136525101 @default.
- W2090460358 hasConceptScore W2090460358C142724271 @default.
- W2090460358 hasConceptScore W2090460358C159985019 @default.
- W2090460358 hasConceptScore W2090460358C171250308 @default.
- W2090460358 hasConceptScore W2090460358C191897082 @default.
- W2090460358 hasConceptScore W2090460358C192562407 @default.
- W2090460358 hasConceptScore W2090460358C204787440 @default.
- W2090460358 hasConceptScore W2090460358C26771246 @default.
- W2090460358 hasConceptScore W2090460358C2777289219 @default.
- W2090460358 hasConceptScore W2090460358C2778871202 @default.
- W2090460358 hasConceptScore W2090460358C2779227376 @default.
- W2090460358 hasConceptScore W2090460358C2779851234 @default.
- W2090460358 hasConceptScore W2090460358C49040817 @default.
- W2090460358 hasConceptScore W2090460358C544956773 @default.
- W2090460358 hasConceptScore W2090460358C71924100 @default.
- W2090460358 hasIssue "2-4" @default.
- W2090460358 hasLocation W20904603581 @default.
- W2090460358 hasOpenAccess W2090460358 @default.
- W2090460358 hasPrimaryLocation W20904603581 @default.
- W2090460358 hasRelatedWork W1515869541 @default.
- W2090460358 hasRelatedWork W1968277604 @default.
- W2090460358 hasRelatedWork W1985653085 @default.
- W2090460358 hasRelatedWork W2091849607 @default.
- W2090460358 hasRelatedWork W2092438402 @default.
- W2090460358 hasRelatedWork W2112000900 @default.
- W2090460358 hasRelatedWork W2398511631 @default.
- W2090460358 hasRelatedWork W2596885075 @default.
- W2090460358 hasRelatedWork W3174430832 @default.
- W2090460358 hasRelatedWork W4221077969 @default.
- W2090460358 hasVolume "81" @default.
- W2090460358 isParatext "false" @default.
- W2090460358 isRetracted "false" @default.
- W2090460358 magId "2090460358" @default.
- W2090460358 workType "article" @default.