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- W2090465065 abstract "Realizing an optically flat surface during high-speed scanning is a crucial factor for the micromirror with large mirror plate. This paper presents the dynamic deformation analysis of stretched polycrystalline (poly-) Si membrane of flat and lightweight drum-type micromirror. The drum-type micromirror is realized using a tense poly-Si membrane across a rigid crystalline (c-) Si ring. The total peak-to-valley surface deformation realized in the designed micromirror is about 50 nm and observed on the connecting part between the c-Si ring and the poly-Si membrane. The stress concentration in this connecting part is investigated using the amount of surface distortion. The amount of the dynamic deformation in the poly-Si membrane is less than 40 nm. This satisfies the optical flatness compared to the wavelength of blue light." @default.
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- W2090465065 date "2011-11-01" @default.
- W2090465065 modified "2023-09-27" @default.
- W2090465065 title "Dynamic deformation of stretched membrane in drum-type micromirror" @default.
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- W2090465065 doi "https://doi.org/10.1109/mhs.2011.6102188" @default.
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