Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090640010> ?p ?o ?g. }
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with 100 items per page.
- W2090640010 endingPage "111" @default.
- W2090640010 startingPage "108" @default.
- W2090640010 abstract "In this paper, the electrical and physical analysis is carried out to investigate the effect of Al2O3 capping layer on ZnO film using atomic layer deposition. ZnO TFTs shows the metallic conduction behavior as Al2O3 capping layer thickness increases. From SIMS analysis, it is found out that the diffusion of Al into ZnO film is enhanced according to Al2O3 capping layer thickness. Moreover, the defects related to oxygen such as oxygen vacancy increase from XPS analysis and ZnO films reveal less compressive stress by substitution of Zn with Al form XRD analysis. That is, the metallic conduction behavior of ZnO TFTs with Al2O3 capping layer can be explained due to increase in the carrier concentration in ZnO channel layer from oxygen vacancy and substitution of Zn with Al." @default.
- W2090640010 created "2016-06-24" @default.
- W2090640010 creator A5013051728 @default.
- W2090640010 creator A5018128280 @default.
- W2090640010 creator A5022473518 @default.
- W2090640010 creator A5046871641 @default.
- W2090640010 creator A5075854126 @default.
- W2090640010 creator A5082702898 @default.
- W2090640010 creator A5084346302 @default.
- W2090640010 date "2013-01-01" @default.
- W2090640010 modified "2023-09-26" @default.
- W2090640010 title "Effect of Al<sub>2</sub>O<sub>3</sub> Capping Layer in ZnO TFT Fabricated by Atomic Layer Deposition" @default.
- W2090640010 cites W1973035291 @default.
- W2090640010 cites W1995045844 @default.
- W2090640010 cites W2018677613 @default.
- W2090640010 cites W2055149097 @default.
- W2090640010 cites W2069419250 @default.
- W2090640010 doi "https://doi.org/10.4028/www.scientific.net/amr.658.108" @default.
- W2090640010 hasPublicationYear "2013" @default.
- W2090640010 type Work @default.
- W2090640010 sameAs 2090640010 @default.
- W2090640010 citedByCount "0" @default.
- W2090640010 crossrefType "journal-article" @default.
- W2090640010 hasAuthorship W2090640010A5013051728 @default.
- W2090640010 hasAuthorship W2090640010A5018128280 @default.
- W2090640010 hasAuthorship W2090640010A5022473518 @default.
- W2090640010 hasAuthorship W2090640010A5046871641 @default.
- W2090640010 hasAuthorship W2090640010A5075854126 @default.
- W2090640010 hasAuthorship W2090640010A5082702898 @default.
- W2090640010 hasAuthorship W2090640010A5084346302 @default.
- W2090640010 hasConcept C113196181 @default.
- W2090640010 hasConcept C114221277 @default.
- W2090640010 hasConcept C127413603 @default.
- W2090640010 hasConcept C151730666 @default.
- W2090640010 hasConcept C171250308 @default.
- W2090640010 hasConcept C175708663 @default.
- W2090640010 hasConcept C178790620 @default.
- W2090640010 hasConcept C185592680 @default.
- W2090640010 hasConcept C191897082 @default.
- W2090640010 hasConcept C192562407 @default.
- W2090640010 hasConcept C2779227376 @default.
- W2090640010 hasConcept C2816523 @default.
- W2090640010 hasConcept C42360764 @default.
- W2090640010 hasConcept C43617362 @default.
- W2090640010 hasConcept C540031477 @default.
- W2090640010 hasConcept C544153396 @default.
- W2090640010 hasConcept C64297162 @default.
- W2090640010 hasConcept C69544855 @default.
- W2090640010 hasConcept C8010536 @default.
- W2090640010 hasConcept C86803240 @default.
- W2090640010 hasConcept C87359718 @default.
- W2090640010 hasConceptScore W2090640010C113196181 @default.
- W2090640010 hasConceptScore W2090640010C114221277 @default.
- W2090640010 hasConceptScore W2090640010C127413603 @default.
- W2090640010 hasConceptScore W2090640010C151730666 @default.
- W2090640010 hasConceptScore W2090640010C171250308 @default.
- W2090640010 hasConceptScore W2090640010C175708663 @default.
- W2090640010 hasConceptScore W2090640010C178790620 @default.
- W2090640010 hasConceptScore W2090640010C185592680 @default.
- W2090640010 hasConceptScore W2090640010C191897082 @default.
- W2090640010 hasConceptScore W2090640010C192562407 @default.
- W2090640010 hasConceptScore W2090640010C2779227376 @default.
- W2090640010 hasConceptScore W2090640010C2816523 @default.
- W2090640010 hasConceptScore W2090640010C42360764 @default.
- W2090640010 hasConceptScore W2090640010C43617362 @default.
- W2090640010 hasConceptScore W2090640010C540031477 @default.
- W2090640010 hasConceptScore W2090640010C544153396 @default.
- W2090640010 hasConceptScore W2090640010C64297162 @default.
- W2090640010 hasConceptScore W2090640010C69544855 @default.
- W2090640010 hasConceptScore W2090640010C8010536 @default.
- W2090640010 hasConceptScore W2090640010C86803240 @default.
- W2090640010 hasConceptScore W2090640010C87359718 @default.
- W2090640010 hasLocation W20906400101 @default.
- W2090640010 hasOpenAccess W2090640010 @default.
- W2090640010 hasPrimaryLocation W20906400101 @default.
- W2090640010 hasRelatedWork W1642436573 @default.
- W2090640010 hasRelatedWork W1928560104 @default.
- W2090640010 hasRelatedWork W1998994326 @default.
- W2090640010 hasRelatedWork W2093196984 @default.
- W2090640010 hasRelatedWork W2113536851 @default.
- W2090640010 hasRelatedWork W2510321789 @default.
- W2090640010 hasRelatedWork W3175146547 @default.
- W2090640010 hasRelatedWork W4247238219 @default.
- W2090640010 hasRelatedWork W4321263035 @default.
- W2090640010 hasRelatedWork W326520612 @default.
- W2090640010 hasVolume "658" @default.
- W2090640010 isParatext "false" @default.
- W2090640010 isRetracted "false" @default.
- W2090640010 magId "2090640010" @default.
- W2090640010 workType "article" @default.