Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090654059> ?p ?o ?g. }
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- W2090654059 endingPage "435" @default.
- W2090654059 startingPage "430" @default.
- W2090654059 abstract "We report on the formation of a lateral comb drive on poly-methyl-meth-acrylate (PMMA) using the hot embossing technique. A hot embossing mold insert is fabricated on a silicon wafer by means of lithography and inductive coupled plasma dry etching. The comb drive microstructure is hot embossed under a molding force of 35000 N at 130 °C. We demonstrate the comb drive, 80 units of interdigitated parallel capacitors with the finger gap and width both being 10 μm. The minimum feature size is 5 μm and the thickness of the structure is 60 μm, which makes the aspect ratio 12:1. The comb drive strokes 5 μm under an actuation potential of 180 V. We also present a brief description of the design and simulation with ANSYS." @default.
- W2090654059 created "2016-06-24" @default.
- W2090654059 creator A5089305312 @default.
- W2090654059 creator A5090981090 @default.
- W2090654059 date "2003-03-17" @default.
- W2090654059 modified "2023-09-27" @default.
- W2090654059 title "Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique" @default.
- W2090654059 cites W1644265269 @default.
- W2090654059 cites W1995190956 @default.
- W2090654059 cites W2003723860 @default.
- W2090654059 cites W2034935888 @default.
- W2090654059 cites W2047833435 @default.
- W2090654059 cites W2047964598 @default.
- W2090654059 cites W2063864169 @default.
- W2090654059 cites W2067695573 @default.
- W2090654059 cites W2074455935 @default.
- W2090654059 cites W2100916163 @default.
- W2090654059 cites W2143180769 @default.
- W2090654059 cites W2148232877 @default.
- W2090654059 cites W2151437947 @default.
- W2090654059 doi "https://doi.org/10.1088/0960-1317/13/3/312" @default.
- W2090654059 hasPublicationYear "2003" @default.
- W2090654059 type Work @default.
- W2090654059 sameAs 2090654059 @default.
- W2090654059 citedByCount "75" @default.
- W2090654059 countsByYear W20906540592012 @default.
- W2090654059 countsByYear W20906540592013 @default.
- W2090654059 countsByYear W20906540592014 @default.
- W2090654059 countsByYear W20906540592016 @default.
- W2090654059 countsByYear W20906540592017 @default.
- W2090654059 countsByYear W20906540592018 @default.
- W2090654059 countsByYear W20906540592019 @default.
- W2090654059 countsByYear W20906540592020 @default.
- W2090654059 countsByYear W20906540592021 @default.
- W2090654059 countsByYear W20906540592022 @default.
- W2090654059 countsByYear W20906540592023 @default.
- W2090654059 crossrefType "journal-article" @default.
- W2090654059 hasAuthorship W2090654059A5089305312 @default.
- W2090654059 hasAuthorship W2090654059A5090981090 @default.
- W2090654059 hasConcept C100460472 @default.
- W2090654059 hasConcept C124634506 @default.
- W2090654059 hasConcept C130472188 @default.
- W2090654059 hasConcept C136525101 @default.
- W2090654059 hasConcept C142724271 @default.
- W2090654059 hasConcept C155840801 @default.
- W2090654059 hasConcept C159985019 @default.
- W2090654059 hasConcept C160671074 @default.
- W2090654059 hasConcept C192562407 @default.
- W2090654059 hasConcept C204223013 @default.
- W2090654059 hasConcept C204787440 @default.
- W2090654059 hasConcept C2776392700 @default.
- W2090654059 hasConcept C2779227376 @default.
- W2090654059 hasConcept C2780098074 @default.
- W2090654059 hasConcept C2780566776 @default.
- W2090654059 hasConcept C49040817 @default.
- W2090654059 hasConcept C67558686 @default.
- W2090654059 hasConcept C71924100 @default.
- W2090654059 hasConcept C82558694 @default.
- W2090654059 hasConceptScore W2090654059C100460472 @default.
- W2090654059 hasConceptScore W2090654059C124634506 @default.
- W2090654059 hasConceptScore W2090654059C130472188 @default.
- W2090654059 hasConceptScore W2090654059C136525101 @default.
- W2090654059 hasConceptScore W2090654059C142724271 @default.
- W2090654059 hasConceptScore W2090654059C155840801 @default.
- W2090654059 hasConceptScore W2090654059C159985019 @default.
- W2090654059 hasConceptScore W2090654059C160671074 @default.
- W2090654059 hasConceptScore W2090654059C192562407 @default.
- W2090654059 hasConceptScore W2090654059C204223013 @default.
- W2090654059 hasConceptScore W2090654059C204787440 @default.
- W2090654059 hasConceptScore W2090654059C2776392700 @default.
- W2090654059 hasConceptScore W2090654059C2779227376 @default.
- W2090654059 hasConceptScore W2090654059C2780098074 @default.
- W2090654059 hasConceptScore W2090654059C2780566776 @default.
- W2090654059 hasConceptScore W2090654059C49040817 @default.
- W2090654059 hasConceptScore W2090654059C67558686 @default.
- W2090654059 hasConceptScore W2090654059C71924100 @default.
- W2090654059 hasConceptScore W2090654059C82558694 @default.
- W2090654059 hasIssue "3" @default.
- W2090654059 hasLocation W20906540591 @default.
- W2090654059 hasOpenAccess W2090654059 @default.
- W2090654059 hasPrimaryLocation W20906540591 @default.
- W2090654059 hasRelatedWork W1994651542 @default.
- W2090654059 hasRelatedWork W1995336291 @default.
- W2090654059 hasRelatedWork W2027012391 @default.
- W2090654059 hasRelatedWork W2057382384 @default.
- W2090654059 hasRelatedWork W2063998555 @default.
- W2090654059 hasRelatedWork W2072764425 @default.
- W2090654059 hasRelatedWork W2162355139 @default.
- W2090654059 hasRelatedWork W2592785433 @default.
- W2090654059 hasRelatedWork W2767576848 @default.
- W2090654059 hasRelatedWork W3090046395 @default.
- W2090654059 hasVolume "13" @default.
- W2090654059 isParatext "false" @default.
- W2090654059 isRetracted "false" @default.
- W2090654059 magId "2090654059" @default.
- W2090654059 workType "article" @default.