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• W2090717130 abstract "We report the design, device fabrication, and measurements of tunable silicon photonic band gap microcavities in optical waveguides, using direct application of piezoelectric-induced strain to the photonic crystal. We show, through first-order perturbation computations and experimental measurements, a 1.54 nm shift in cavity resonances at 1.56 μm wavelengths for an applied strain of 0.04%. The strain is applied through integrated piezoelectric microactuators. For operation at infrared wavelengths, we combine x-ray and electron-beam lithography with thin-film piezoelectric processing. This level of integration permits realizable silicon-based photonic chip devices, such as high-density optical filters, with active reconfiguration." @default.
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• W2090717130 date "2004-02-23" @default.
• W2090717130 modified "2023-09-26" @default.
• W2090717130 title "Strain-tunable silicon photonic band gap microcavities in optical waveguides" @default.
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• W2090717130 doi "https://doi.org/10.1063/1.1649803" @default.
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