FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090717798> ?p ?o ?g. }

• W2090717798 endingPage "1234" @default.
• W2090717798 startingPage "1231" @default.
• W2090717798 abstract "Ni / Al 2 O 3 / Al film was fabricated for a high performance capacitor using electrochemical etching, anodizing, and electroless-plating. The focus of this study was to form seamless and void-free Ni electrodes on Al2O3/Al with etched tunnels. The conventional deposition method of metal was limited to full-fill for the Al tunnel pits with a high aspect ratio, a depth of about 40 μm, and diameters of about 0.5–1 μm. Nevertheless, Ni filling in tunnel pits was achieved through electroless-plating for the first time, producing a seamless and void-free electrode. The authors used a polyethylene glycol solution bath to block the Pd on top of the tunnel prior to electroless-plating, which enabled the Ni to deposit preferentially at the bottom, leading to a filling from the bottom to the top. Finally, the capacitance density for the etched and Ni electroless plated films was 220 nF/cm2 while that for a film without any etch tunnel was 12.5 nF/cm2." @default.
• W2090717798 created "2016-06-24" @default.
• W2090717798 creator A5002184891 @default.
• W2090717798 creator A5007993375 @default.
• W2090717798 creator A5017580328 @default.
• W2090717798 creator A5047362137 @default.
• W2090717798 creator A5059498826 @default.
• W2090717798 creator A5066914896 @default.
• W2090717798 creator A5071047472 @default.
• W2090717798 creator A5075278021 @default.
• W2090717798 creator A5090455719 @default.
• W2090717798 date "2010-11-01" @default.
• W2090717798 modified "2023-10-18" @default.
• W2090717798 title "Ni full-filling into Al2O3/Al film with etched tunnels using a polyethylene glycol solution bath in electroless-plating" @default.
• W2090717798 cites W15403317 @default.
• W2090717798 cites W1965430106 @default.
• W2090717798 cites W1977731035 @default.
• W2090717798 cites W1987711246 @default.
• W2090717798 cites W1994603328 @default.
• W2090717798 cites W2004390213 @default.
• W2090717798 cites W2006560664 @default.
• W2090717798 cites W2015933552 @default.
• W2090717798 cites W2016819464 @default.
• W2090717798 cites W2029084652 @default.
• W2090717798 cites W2050927162 @default.
• W2090717798 cites W2055486200 @default.
• W2090717798 cites W2077142529 @default.
• W2090717798 cites W2089172305 @default.
• W2090717798 cites W2109008398 @default.
• W2090717798 cites W2122805411 @default.
• W2090717798 cites W2148859209 @default.
• W2090717798 doi "https://doi.org/10.1116/1.3506105" @default.
• W2090717798 hasPublicationYear "2010" @default.
• W2090717798 type Work @default.
• W2090717798 sameAs 2090717798 @default.
• W2090717798 citedByCount "2" @default.
• W2090717798 crossrefType "journal-article" @default.
• W2090717798 hasAuthorship W2090717798A5002184891 @default.
• W2090717798 hasAuthorship W2090717798A5007993375 @default.
• W2090717798 hasAuthorship W2090717798A5017580328 @default.
• W2090717798 hasAuthorship W2090717798A5047362137 @default.
• W2090717798 hasAuthorship W2090717798A5059498826 @default.
• W2090717798 hasAuthorship W2090717798A5066914896 @default.
• W2090717798 hasAuthorship W2090717798A5071047472 @default.
• W2090717798 hasAuthorship W2090717798A5075278021 @default.
• W2090717798 hasAuthorship W2090717798A5090455719 @default.
• W2090717798 hasConcept C100460472 @default.
• W2090717798 hasConcept C127313418 @default.
• W2090717798 hasConcept C127413603 @default.
• W2090717798 hasConcept C147789679 @default.
• W2090717798 hasConcept C159985019 @default.
• W2090717798 hasConcept C17525397 @default.
• W2090717798 hasConcept C185592680 @default.
• W2090717798 hasConcept C191897082 @default.
• W2090717798 hasConcept C192562407 @default.
• W2090717798 hasConcept C22016385 @default.
• W2090717798 hasConcept C2776964284 @default.
• W2090717798 hasConcept C2776985018 @default.
• W2090717798 hasConcept C2779227376 @default.
• W2090717798 hasConcept C2779772531 @default.
• W2090717798 hasConcept C2780727033 @default.
• W2090717798 hasConcept C29216876 @default.
• W2090717798 hasConcept C42360764 @default.
• W2090717798 hasConcept C513153333 @default.
• W2090717798 hasConcept C51807945 @default.
• W2090717798 hasConcept C52859227 @default.
• W2090717798 hasConcept C8058405 @default.
• W2090717798 hasConceptScore W2090717798C100460472 @default.
• W2090717798 hasConceptScore W2090717798C127313418 @default.
• W2090717798 hasConceptScore W2090717798C127413603 @default.
• W2090717798 hasConceptScore W2090717798C147789679 @default.
• W2090717798 hasConceptScore W2090717798C159985019 @default.
• W2090717798 hasConceptScore W2090717798C17525397 @default.
• W2090717798 hasConceptScore W2090717798C185592680 @default.
• W2090717798 hasConceptScore W2090717798C191897082 @default.
• W2090717798 hasConceptScore W2090717798C192562407 @default.
• W2090717798 hasConceptScore W2090717798C22016385 @default.
• W2090717798 hasConceptScore W2090717798C2776964284 @default.
• W2090717798 hasConceptScore W2090717798C2776985018 @default.
• W2090717798 hasConceptScore W2090717798C2779227376 @default.
• W2090717798 hasConceptScore W2090717798C2779772531 @default.
• W2090717798 hasConceptScore W2090717798C2780727033 @default.
• W2090717798 hasConceptScore W2090717798C29216876 @default.
• W2090717798 hasConceptScore W2090717798C42360764 @default.
• W2090717798 hasConceptScore W2090717798C513153333 @default.
• W2090717798 hasConceptScore W2090717798C51807945 @default.
• W2090717798 hasConceptScore W2090717798C52859227 @default.
• W2090717798 hasConceptScore W2090717798C8058405 @default.
• W2090717798 hasIssue "6" @default.
• W2090717798 hasLocation W20907177981 @default.
• W2090717798 hasOpenAccess W2090717798 @default.
• W2090717798 hasPrimaryLocation W20907177981 @default.
• W2090717798 hasRelatedWork W161223740 @default.
• W2090717798 hasRelatedWork W1987658782 @default.
• W2090717798 hasRelatedWork W2023560377 @default.
• W2090717798 hasRelatedWork W2081477005 @default.
• W2090717798 hasRelatedWork W2090717798 @default.
• W2090717798 hasRelatedWork W2354187958 @default.

• next