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- W2090801615 abstract "Polarization-dependent vertically coupled microdisk resonant filters are experimentally demonstrated based on a multilayer silicon nitride platform. An improved planarization technique based on conventional chemical-mechanical polishing and dry-etching is adopted to flatten the gap film surface for a different core layer deposition after the first-layer photonic circuit is formed. The resonator can realize a high quality factor (> 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sup> ) and large suppression value (>20 dB) for the transverse electric light, while the transverse magnetic wave has weak resonant coupling. Other vertically coupled multifunctional devices can be further expected based on the current integration method. A cascaded resonator filter with superior characteristics, such as a flat passband, a steep roll-off, and an enhanced suppression ratio is developed." @default.
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- W2090801615 date "2014-12-01" @default.
- W2090801615 modified "2023-10-18" @default.
- W2090801615 title "Vertically Coupled Silicon Nitride Microdisk Resonant Filters" @default.
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- W2090801615 doi "https://doi.org/10.1109/lpt.2014.2358216" @default.
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