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- W2090865031 abstract "The physical vapour deposition arc process offers the possibility to deposit many different coating systems. Usually the single-source mode is applied for the deposition of ternary hard coatings using alloyed cathodes. For the deposition of efficient coatings, suitable cathode materials for the arc evaporation have to be developed. Being often very costly, this development can be avoided through the use of the multisource mode (MSM), where each element is assigned to a separate evaporator unit. Coatings within the systems Ti-Al-N, Ti-Cr-N and Cr-Al-N are deposited by applying the MSM. In addition to the fact that a deposition of coatings within the system Cr-Al-N can be realized only with MSM, the results show that MSM coatings have at least equivalent quality when compared with coatings produced in the single-source mode. The MSM coating process may be characterized by the superposition of the evaporation behaviour of the single elements. Potential process variations and their influence upon coating properties are illustrated within the Cr-Al-N system." @default.
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- W2090865031 date "1994-12-01" @default.
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- W2090865031 title "The multisource arc process for depositing ternary Cr- and Ti-based coatings" @default.
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- W2090865031 doi "https://doi.org/10.1016/0257-8972(94)90178-3" @default.
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