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- W2090875666 abstract "For multichamber and in-situ processing of microelectronic materials, there are few hundred steps in a manufacturing line. The design of such processing systems require careful simulation, modeling, and planning. Our basic approach is the idea of an interactive software design environment for equipment, process, and manufacturing line modeling and simulation, which provides a way to integrate the manufacturing line and its simulator tightly." @default.
- W2090875666 created "2016-06-24" @default.
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- W2090875666 date "1990-02-15" @default.
- W2090875666 modified "2023-09-23" @default.
- W2090875666 title "Multichamber And In-Situ Processing System Design And Control" @default.
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- W2090875666 doi "https://doi.org/10.1117/12.963934" @default.
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