Matches in SemOpenAlex for { <https://semopenalex.org/work/W2090939615> ?p ?o ?g. }
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- W2090939615 endingPage "2573" @default.
- W2090939615 startingPage "2567" @default.
- W2090939615 abstract "A simple Cl2/Ar plasma chemistry can provide smooth, high-rate etching of InP, InAs, InGaAs, A1InAs, and InGaAsP at room temperature under conditions in which there is a balance between formation and sputter desorption of the normally involatile InCl3. When the neutral/ion ratio is either too high or too low, surface roughening is apparent due either to the presence of InCl3, or to preferential loss of the group V element. The etching has been investigated as a function of microwave power (600–1000 W), rf power (0–300 W), process pressure (1.5–10 mTorr), and Cl2:Ar ratio under electron cyclotron resonance conditions. Use of N2 or H2, rather than Ar, as gas additives to the chlorine, did not produce smooth, stoichiometric etched surfaces." @default.
- W2090939615 created "2016-06-24" @default.
- W2090939615 creator A5015775536 @default.
- W2090939615 creator A5017875762 @default.
- W2090939615 creator A5019125937 @default.
- W2090939615 creator A5020266322 @default.
- W2090939615 creator A5032163821 @default.
- W2090939615 creator A5036044934 @default.
- W2090939615 creator A5048005381 @default.
- W2090939615 date "1996-07-01" @default.
- W2090939615 modified "2023-09-27" @default.
- W2090939615 title "Cl2/Ar plasma etching of binary, ternary, and quaternary In-based compound semiconductors" @default.
- W2090939615 doi "https://doi.org/10.1116/1.588769" @default.
- W2090939615 hasPublicationYear "1996" @default.
- W2090939615 type Work @default.
- W2090939615 sameAs 2090939615 @default.
- W2090939615 citedByCount "10" @default.
- W2090939615 countsByYear W20909396152013 @default.
- W2090939615 countsByYear W20909396152016 @default.
- W2090939615 crossrefType "journal-article" @default.
- W2090939615 hasAuthorship W2090939615A5015775536 @default.
- W2090939615 hasAuthorship W2090939615A5017875762 @default.
- W2090939615 hasAuthorship W2090939615A5019125937 @default.
- W2090939615 hasAuthorship W2090939615A5020266322 @default.
- W2090939615 hasAuthorship W2090939615A5032163821 @default.
- W2090939615 hasAuthorship W2090939615A5036044934 @default.
- W2090939615 hasAuthorship W2090939615A5048005381 @default.
- W2090939615 hasConcept C100460472 @default.
- W2090939615 hasConcept C107187091 @default.
- W2090939615 hasConcept C113196181 @default.
- W2090939615 hasConcept C121332964 @default.
- W2090939615 hasConcept C130472188 @default.
- W2090939615 hasConcept C144082473 @default.
- W2090939615 hasConcept C145148216 @default.
- W2090939615 hasConcept C147789679 @default.
- W2090939615 hasConcept C150394285 @default.
- W2090939615 hasConcept C162711632 @default.
- W2090939615 hasConcept C171250308 @default.
- W2090939615 hasConcept C175361016 @default.
- W2090939615 hasConcept C178790620 @default.
- W2090939615 hasConcept C185592680 @default.
- W2090939615 hasConcept C19067145 @default.
- W2090939615 hasConcept C192562407 @default.
- W2090939615 hasConcept C199360897 @default.
- W2090939615 hasConcept C22423302 @default.
- W2090939615 hasConcept C2779227376 @default.
- W2090939615 hasConcept C30646810 @default.
- W2090939615 hasConcept C41008148 @default.
- W2090939615 hasConcept C43617362 @default.
- W2090939615 hasConcept C62520636 @default.
- W2090939615 hasConcept C64452783 @default.
- W2090939615 hasConcept C82706917 @default.
- W2090939615 hasConcept C97355855 @default.
- W2090939615 hasConceptScore W2090939615C100460472 @default.
- W2090939615 hasConceptScore W2090939615C107187091 @default.
- W2090939615 hasConceptScore W2090939615C113196181 @default.
- W2090939615 hasConceptScore W2090939615C121332964 @default.
- W2090939615 hasConceptScore W2090939615C130472188 @default.
- W2090939615 hasConceptScore W2090939615C144082473 @default.
- W2090939615 hasConceptScore W2090939615C145148216 @default.
- W2090939615 hasConceptScore W2090939615C147789679 @default.
- W2090939615 hasConceptScore W2090939615C150394285 @default.
- W2090939615 hasConceptScore W2090939615C162711632 @default.
- W2090939615 hasConceptScore W2090939615C171250308 @default.
- W2090939615 hasConceptScore W2090939615C175361016 @default.
- W2090939615 hasConceptScore W2090939615C178790620 @default.
- W2090939615 hasConceptScore W2090939615C185592680 @default.
- W2090939615 hasConceptScore W2090939615C19067145 @default.
- W2090939615 hasConceptScore W2090939615C192562407 @default.
- W2090939615 hasConceptScore W2090939615C199360897 @default.
- W2090939615 hasConceptScore W2090939615C22423302 @default.
- W2090939615 hasConceptScore W2090939615C2779227376 @default.
- W2090939615 hasConceptScore W2090939615C30646810 @default.
- W2090939615 hasConceptScore W2090939615C41008148 @default.
- W2090939615 hasConceptScore W2090939615C43617362 @default.
- W2090939615 hasConceptScore W2090939615C62520636 @default.
- W2090939615 hasConceptScore W2090939615C64452783 @default.
- W2090939615 hasConceptScore W2090939615C82706917 @default.
- W2090939615 hasConceptScore W2090939615C97355855 @default.
- W2090939615 hasIssue "4" @default.
- W2090939615 hasLocation W20909396151 @default.
- W2090939615 hasOpenAccess W2090939615 @default.
- W2090939615 hasPrimaryLocation W20909396151 @default.
- W2090939615 hasRelatedWork W1992919011 @default.
- W2090939615 hasRelatedWork W2051292845 @default.
- W2090939615 hasRelatedWork W2069888911 @default.
- W2090939615 hasRelatedWork W2078943997 @default.
- W2090939615 hasRelatedWork W2087201154 @default.
- W2090939615 hasRelatedWork W2088632287 @default.
- W2090939615 hasRelatedWork W2100868662 @default.
- W2090939615 hasRelatedWork W2159260355 @default.
- W2090939615 hasRelatedWork W2239343226 @default.
- W2090939615 hasRelatedWork W2245373849 @default.
- W2090939615 hasVolume "14" @default.
- W2090939615 isParatext "false" @default.
- W2090939615 isRetracted "false" @default.
- W2090939615 magId "2090939615" @default.
- W2090939615 workType "article" @default.