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- W2090974321 abstract "In this new process for phase-shifting mask fabrication, molybdenum silicide (MoSi) is used as an optical shield layer and spin-on glass (SOG) as a phase-shifter layer. Chromium is employed as an etch-stopper during SOG etching. Cr etch-stopper will be removed at the end of tiie process, therefore all optical problems related to an etch-stopper are avoided. This Cr etch-stopper is also useful in inspection and repair of shifter remaining defects. At first, we will describe the fabrication process including the shifter-defect inspection and repair. Secondary, we will discuss the phase-shifting mask accuracy and its influence to the printed resist pattern when using the alternating type phase-shifting mask. Lastly,we will mention the application result of development of lithography for 64Mbit DRAM using this process." @default.
- W2090974321 created "2016-06-24" @default.
- W2090974321 creator A5002033800 @default.
- W2090974321 creator A5017990154 @default.
- W2090974321 creator A5028349087 @default.
- W2090974321 creator A5068597702 @default.
- W2090974321 creator A5069386130 @default.
- W2090974321 creator A5084903623 @default.
- W2090974321 creator A5085403136 @default.
- W2090974321 creator A5090605125 @default.
- W2090974321 date "1992-06-01" @default.
- W2090974321 modified "2023-10-16" @default.
- W2090974321 title "Novel process for phase-shifting mask fabrication" @default.
- W2090974321 cites W2534721793 @default.
- W2090974321 doi "https://doi.org/10.1117/12.130323" @default.
- W2090974321 hasPublicationYear "1992" @default.
- W2090974321 type Work @default.
- W2090974321 sameAs 2090974321 @default.
- W2090974321 citedByCount "3" @default.
- W2090974321 crossrefType "proceedings-article" @default.
- W2090974321 hasAuthorship W2090974321A5002033800 @default.
- W2090974321 hasAuthorship W2090974321A5017990154 @default.
- W2090974321 hasAuthorship W2090974321A5028349087 @default.
- W2090974321 hasAuthorship W2090974321A5068597702 @default.
- W2090974321 hasAuthorship W2090974321A5069386130 @default.
- W2090974321 hasAuthorship W2090974321A5084903623 @default.
- W2090974321 hasAuthorship W2090974321A5085403136 @default.
- W2090974321 hasAuthorship W2090974321A5090605125 @default.
- W2090974321 hasConcept C100460472 @default.
- W2090974321 hasConcept C103864889 @default.
- W2090974321 hasConcept C105487726 @default.
- W2090974321 hasConcept C111919701 @default.
- W2090974321 hasConcept C136525101 @default.
- W2090974321 hasConcept C142724271 @default.
- W2090974321 hasConcept C171250308 @default.
- W2090974321 hasConcept C192562407 @default.
- W2090974321 hasConcept C204223013 @default.
- W2090974321 hasConcept C204787440 @default.
- W2090974321 hasConcept C2779227376 @default.
- W2090974321 hasConcept C41008148 @default.
- W2090974321 hasConcept C49040817 @default.
- W2090974321 hasConcept C53524968 @default.
- W2090974321 hasConcept C71924100 @default.
- W2090974321 hasConcept C7366592 @default.
- W2090974321 hasConcept C90327742 @default.
- W2090974321 hasConcept C98045186 @default.
- W2090974321 hasConceptScore W2090974321C100460472 @default.
- W2090974321 hasConceptScore W2090974321C103864889 @default.
- W2090974321 hasConceptScore W2090974321C105487726 @default.
- W2090974321 hasConceptScore W2090974321C111919701 @default.
- W2090974321 hasConceptScore W2090974321C136525101 @default.
- W2090974321 hasConceptScore W2090974321C142724271 @default.
- W2090974321 hasConceptScore W2090974321C171250308 @default.
- W2090974321 hasConceptScore W2090974321C192562407 @default.
- W2090974321 hasConceptScore W2090974321C204223013 @default.
- W2090974321 hasConceptScore W2090974321C204787440 @default.
- W2090974321 hasConceptScore W2090974321C2779227376 @default.
- W2090974321 hasConceptScore W2090974321C41008148 @default.
- W2090974321 hasConceptScore W2090974321C49040817 @default.
- W2090974321 hasConceptScore W2090974321C53524968 @default.
- W2090974321 hasConceptScore W2090974321C71924100 @default.
- W2090974321 hasConceptScore W2090974321C7366592 @default.
- W2090974321 hasConceptScore W2090974321C90327742 @default.
- W2090974321 hasConceptScore W2090974321C98045186 @default.
- W2090974321 hasLocation W20909743211 @default.
- W2090974321 hasOpenAccess W2090974321 @default.
- W2090974321 hasPrimaryLocation W20909743211 @default.
- W2090974321 hasRelatedWork W1538884143 @default.
- W2090974321 hasRelatedWork W2035960632 @default.
- W2090974321 hasRelatedWork W2065267811 @default.
- W2090974321 hasRelatedWork W2092403471 @default.
- W2090974321 hasRelatedWork W2094129987 @default.
- W2090974321 hasRelatedWork W2104315876 @default.
- W2090974321 hasRelatedWork W2118034025 @default.
- W2090974321 hasRelatedWork W2136084319 @default.
- W2090974321 hasRelatedWork W2542026544 @default.
- W2090974321 hasRelatedWork W2781516831 @default.
- W2090974321 isParatext "false" @default.
- W2090974321 isRetracted "false" @default.
- W2090974321 magId "2090974321" @default.
- W2090974321 workType "article" @default.