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• W2090976415 abstract "At low temperatures, hydrogen desorption is known to be the rate-limiting process in silicon germanium film growth via chemical vapor deposition. Since surface germanium lowers the hydrogen desorption barrier, Si(x)Ge((1-x)) film growth rate increases with the surface germanium fraction. At high temperatures, however, the molecular mechanisms determining the epitaxial growth rate are not well established despite much experimental work. We investigate these mechanisms in the context of disilane adsorption because disilane is an important precursor used in film growth. In particular, we want to understand the molecular steps that lead, in the high temperature regime, to a decrease in growth rate as the surface germanium increases. In addition, there is a need to consider the issue of whether disilane adsorbs via silicon-silicon bond dissociation or via silicon-hydrogen bond dissociation. It is usually assumed that disilane adsorption occurs via silicon-silicon bond dissociation, but in recent work we provided theoretical evidence that silicon-hydrogen bond dissociation is more important. In order to address these issues, we calculate the chemisorption barriers for disilane on silicon germanium using first-principles density functional theory methods. We use the calculated barriers to estimate film growth rates that are then critically compared to the experimental data. This enables us to establish a connection between the dependence of the film growth rate on the surface germanium content and the kinetics of the initial adsorption step. We show that the generally accepted mechanism where disilane chemisorbs via silicon-silicon bond dissociation is not consistent with the data for film growth kinetics. Silicon-hydrogen bond dissociation paths have to be included in order to give good agreement with the experimental data for high temperature film growth rate." @default.
• W2090976415 created "2016-06-24" @default.
• W2090976415 creator A5016191795 @default.
• W2090976415 creator A5057849305 @default.
• W2090976415 creator A5077367333 @default.
• W2090976415 date "2009-07-28" @default.
• W2090976415 modified "2023-09-26" @default.
• W2090976415 title "Disilane chemisorption on SixGe1−x(100)-(2×1): Molecular mechanisms and implications for film growth rates" @default.
• W2090976415 cites W1543805391 @default.
• W2090976415 cites W1591701563 @default.
• W2090976415 cites W1661108469 @default.
• W2090976415 cites W1964951505 @default.
• W2090976415 cites W1967468515 @default.
• W2090976415 cites W1967740261 @default.
• W2090976415 cites W1968087898 @default.
• W2090976415 cites W1971536159 @default.
• W2090976415 cites W1979378466 @default.
• W2090976415 cites W1981368803 @default.
• W2090976415 cites W1981892235 @default.
• W2090976415 cites W1982080203 @default.
• W2090976415 cites W1983202720 @default.
• W2090976415 cites W1983544008 @default.
• W2090976415 cites W1985549015 @default.
• W2090976415 cites W1989723757 @default.
• W2090976415 cites W1995861779 @default.
• W2090976415 cites W2003102948 @default.
• W2090976415 cites W2014080790 @default.
• W2090976415 cites W2015763048 @default.
• W2090976415 cites W2017968879 @default.
• W2090976415 cites W2021411011 @default.
• W2090976415 cites W2022279482 @default.
• W2090976415 cites W2025081094 @default.
• W2090976415 cites W2025937315 @default.
• W2090976415 cites W2027165947 @default.
• W2090976415 cites W2031760672 @default.
• W2090976415 cites W2033239893 @default.
• W2090976415 cites W2039300797 @default.
• W2090976415 cites W2041287479 @default.
• W2090976415 cites W2042530657 @default.
• W2090976415 cites W2052295701 @default.
• W2090976415 cites W2054463138 @default.
• W2090976415 cites W2059813681 @default.
• W2090976415 cites W2063917423 @default.
• W2090976415 cites W2065490395 @default.
• W2090976415 cites W2071518464 @default.
• W2090976415 cites W2072326906 @default.
• W2090976415 cites W2077909950 @default.
• W2090976415 cites W2079114228 @default.
• W2090976415 cites W2079958112 @default.
• W2090976415 cites W2082744911 @default.
• W2090976415 cites W2084581657 @default.
• W2090976415 cites W2085713289 @default.
• W2090976415 cites W2087585288 @default.
• W2090976415 cites W2101875463 @default.
• W2090976415 cites W2122427541 @default.
• W2090976415 cites W2171172358 @default.
• W2090976415 cites W2055545008 @default.
• W2090976415 doi "https://doi.org/10.1063/1.3191780" @default.
• W2090976415 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19655909" @default.
• W2090976415 hasPublicationYear "2009" @default.
• W2090976415 type Work @default.
• W2090976415 sameAs 2090976415 @default.
• W2090976415 citedByCount "9" @default.
• W2090976415 countsByYear W20909764152013 @default.
• W2090976415 countsByYear W20909764152014 @default.
• W2090976415 countsByYear W20909764152015 @default.
• W2090976415 countsByYear W20909764152016 @default.
• W2090976415 countsByYear W20909764152022 @default.
• W2090976415 crossrefType "journal-article" @default.
• W2090976415 hasAuthorship W2090976415A5016191795 @default.
• W2090976415 hasAuthorship W2090976415A5057849305 @default.
• W2090976415 hasAuthorship W2090976415A5077367333 @default.
• W2090976415 hasConcept C102931765 @default.
• W2090976415 hasConcept C147789679 @default.
• W2090976415 hasConcept C150394285 @default.
• W2090976415 hasConcept C159467904 @default.
• W2090976415 hasConcept C162711632 @default.
• W2090976415 hasConcept C171250308 @default.
• W2090976415 hasConcept C178790620 @default.
• W2090976415 hasConcept C185592680 @default.
• W2090976415 hasConcept C192562407 @default.
• W2090976415 hasConcept C2776259327 @default.
• W2090976415 hasConcept C33790079 @default.
• W2090976415 hasConcept C544956773 @default.
• W2090976415 hasConcept C550623735 @default.
• W2090976415 hasConcept C57410435 @default.
• W2090976415 hasConceptScore W2090976415C102931765 @default.
• W2090976415 hasConceptScore W2090976415C147789679 @default.
• W2090976415 hasConceptScore W2090976415C150394285 @default.
• W2090976415 hasConceptScore W2090976415C159467904 @default.
• W2090976415 hasConceptScore W2090976415C162711632 @default.
• W2090976415 hasConceptScore W2090976415C171250308 @default.
• W2090976415 hasConceptScore W2090976415C178790620 @default.
• W2090976415 hasConceptScore W2090976415C185592680 @default.
• W2090976415 hasConceptScore W2090976415C192562407 @default.
• W2090976415 hasConceptScore W2090976415C2776259327 @default.
• W2090976415 hasConceptScore W2090976415C33790079 @default.
• W2090976415 hasConceptScore W2090976415C544956773 @default.
• W2090976415 hasConceptScore W2090976415C550623735 @default.
• W2090976415 hasConceptScore W2090976415C57410435 @default.

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