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• W2091082738 abstract "The influence of alternating current (AC) target power on film stress, roughness, and x-ray diffraction rocking curve full width half maximum (FWHM) was examined for AlN films deposited using S-gun magnetron sputtering on insulative substrates consisting of Si wafers with 575 nm thermal oxide. As the AC target power was increased from 5 to 8 kW, the deposition rate increased from 9.3 to 15.9 A/s, film stress decreased from 81 to −170 MPa, and the rocking curve FWHM increased from 0.98 to 1.03°. AlN film behavior is observed to change with target life; films deposited at 200 kWh target life were approximately 40 MPa more compressive and had 0.02° degree higher rocking curve FWHM values than films deposited at 130 kWh. AlN films deposited in two depositions were compared with films deposited in a single deposition, in order to better characterize the growth behavior and properties of AlN films deposited on an existing AlN film, which is not well understood. Two deposition films, when compared with single deposition films, showed no variation in residual stress trends or grain size behavior, but the average film roughness increased from 0.7 to 1.4 nm and rocking curve FWHM values increased by more than 0.25°." @default.
• W2091082738 created "2016-06-24" @default.
• W2091082738 creator A5058182915 @default.
• W2091082738 creator A5074962723 @default.
• W2091082738 date "2014-07-24" @default.
• W2091082738 modified "2023-09-26" @default.
• W2091082738 title "Effect of AC target power on AlN film quality" @default.
• W2091082738 cites W1964753392 @default.
• W2091082738 cites W1967888975 @default.
• W2091082738 cites W1982618555 @default.
• W2091082738 cites W1987528942 @default.
• W2091082738 cites W1989487622 @default.
• W2091082738 cites W2002560174 @default.
• W2091082738 cites W2005963883 @default.
• W2091082738 cites W2009883374 @default.
• W2091082738 cites W2015447384 @default.
• W2091082738 cites W2016977568 @default.
• W2091082738 cites W2026374370 @default.
• W2091082738 cites W2033266578 @default.
• W2091082738 cites W2033562417 @default.
• W2091082738 cites W2042705332 @default.
• W2091082738 cites W2043237080 @default.
• W2091082738 cites W2050216120 @default.
• W2091082738 cites W2050890807 @default.
• W2091082738 cites W2054342358 @default.
• W2091082738 cites W2054375689 @default.
• W2091082738 cites W2061136274 @default.
• W2091082738 cites W2067470147 @default.
• W2091082738 cites W2070967937 @default.
• W2091082738 cites W2106436394 @default.
• W2091082738 cites W2109872583 @default.
• W2091082738 cites W2118192020 @default.
• W2091082738 cites W2153205532 @default.
• W2091082738 doi "https://doi.org/10.1116/1.4886776" @default.
• W2091082738 hasPublicationYear "2014" @default.
• W2091082738 type Work @default.
• W2091082738 sameAs 2091082738 @default.
• W2091082738 citedByCount "8" @default.
• W2091082738 countsByYear W20910827382014 @default.
• W2091082738 countsByYear W20910827382015 @default.
• W2091082738 countsByYear W20910827382017 @default.
• W2091082738 countsByYear W20910827382018 @default.
• W2091082738 countsByYear W20910827382020 @default.
• W2091082738 countsByYear W20910827382021 @default.
• W2091082738 crossrefType "journal-article" @default.
• W2091082738 hasAuthorship W2091082738A5058182915 @default.
• W2091082738 hasAuthorship W2091082738A5074962723 @default.
• W2091082738 hasConcept C107365816 @default.
• W2091082738 hasConcept C108649604 @default.
• W2091082738 hasConcept C113196181 @default.
• W2091082738 hasConcept C151730666 @default.
• W2091082738 hasConcept C159985019 @default.
• W2091082738 hasConcept C160671074 @default.
• W2091082738 hasConcept C171250308 @default.
• W2091082738 hasConcept C185592680 @default.
• W2091082738 hasConcept C19067145 @default.
• W2091082738 hasConcept C192191005 @default.
• W2091082738 hasConcept C192562407 @default.
• W2091082738 hasConcept C22423302 @default.
• W2091082738 hasConcept C2816523 @default.
• W2091082738 hasConcept C37292000 @default.
• W2091082738 hasConcept C43617362 @default.
• W2091082738 hasConcept C49040817 @default.
• W2091082738 hasConcept C61427134 @default.
• W2091082738 hasConcept C64297162 @default.
• W2091082738 hasConcept C86803240 @default.
• W2091082738 hasConceptScore W2091082738C107365816 @default.
• W2091082738 hasConceptScore W2091082738C108649604 @default.
• W2091082738 hasConceptScore W2091082738C113196181 @default.
• W2091082738 hasConceptScore W2091082738C151730666 @default.
• W2091082738 hasConceptScore W2091082738C159985019 @default.
• W2091082738 hasConceptScore W2091082738C160671074 @default.
• W2091082738 hasConceptScore W2091082738C171250308 @default.
• W2091082738 hasConceptScore W2091082738C185592680 @default.
• W2091082738 hasConceptScore W2091082738C19067145 @default.
• W2091082738 hasConceptScore W2091082738C192191005 @default.
• W2091082738 hasConceptScore W2091082738C192562407 @default.
• W2091082738 hasConceptScore W2091082738C22423302 @default.
• W2091082738 hasConceptScore W2091082738C2816523 @default.
• W2091082738 hasConceptScore W2091082738C37292000 @default.
• W2091082738 hasConceptScore W2091082738C43617362 @default.
• W2091082738 hasConceptScore W2091082738C49040817 @default.
• W2091082738 hasConceptScore W2091082738C61427134 @default.
• W2091082738 hasConceptScore W2091082738C64297162 @default.
• W2091082738 hasConceptScore W2091082738C86803240 @default.
• W2091082738 hasIssue "5" @default.
• W2091082738 hasLocation W20910827381 @default.
• W2091082738 hasOpenAccess W2091082738 @default.
• W2091082738 hasPrimaryLocation W20910827381 @default.
• W2091082738 hasRelatedWork W1967446175 @default.
• W2091082738 hasRelatedWork W2029962027 @default.
• W2091082738 hasRelatedWork W2030970608 @default.
• W2091082738 hasRelatedWork W2077106834 @default.
• W2091082738 hasRelatedWork W2159138826 @default.
• W2091082738 hasRelatedWork W2301862508 @default.
• W2091082738 hasRelatedWork W2316948141 @default.
• W2091082738 hasRelatedWork W2370679223 @default.
• W2091082738 hasRelatedWork W2916607095 @default.
• W2091082738 hasRelatedWork W3108091200 @default.
• W2091082738 hasVolume "32" @default.

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