Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091172254> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2091172254 endingPage "L478" @default.
- W2091172254 startingPage "L478" @default.
- W2091172254 abstract "A fullerene-derivative nanocomposite resist system based on a positive-type electron-beam resist, ZEP520, is examined for contrast enhancement. The system containing 10 wt% of the derivative shows a substantially enhanced γ-value of 22.9, which is about three-and-a-half times higher than that of a virgin ZEP resist, and exhibits a very-high-contrast 50 nm pattern in an ultrathin film of 150 nm. Etching resistance is also enhanced and the derivative seems to be as effective as C 60 in terms of the number of molecules incorporated. The contrast enhancement by fullerene-derivative incorporation has the potential to further improve the resolution of ZEP and will extend its application in nanolithography." @default.
- W2091172254 created "2016-06-24" @default.
- W2091172254 creator A5041684680 @default.
- W2091172254 creator A5045519518 @default.
- W2091172254 creator A5048967200 @default.
- W2091172254 date "2001-05-01" @default.
- W2091172254 modified "2023-09-24" @default.
- W2091172254 title "Contrast Enhancement of ZEP520 Resist by Fullerene-Derivative Incorporation" @default.
- W2091172254 cites W1997401972 @default.
- W2091172254 cites W2012854644 @default.
- W2091172254 cites W2030465097 @default.
- W2091172254 cites W2063194426 @default.
- W2091172254 cites W2045495127 @default.
- W2091172254 doi "https://doi.org/10.1143/jjap.40.l478" @default.
- W2091172254 hasPublicationYear "2001" @default.
- W2091172254 type Work @default.
- W2091172254 sameAs 2091172254 @default.
- W2091172254 citedByCount "11" @default.
- W2091172254 countsByYear W20911722542012 @default.
- W2091172254 countsByYear W20911722542016 @default.
- W2091172254 countsByYear W20911722542017 @default.
- W2091172254 countsByYear W20911722542019 @default.
- W2091172254 crossrefType "journal-article" @default.
- W2091172254 hasAuthorship W2091172254A5041684680 @default.
- W2091172254 hasAuthorship W2091172254A5045519518 @default.
- W2091172254 hasAuthorship W2091172254A5048967200 @default.
- W2091172254 hasConcept C100460472 @default.
- W2091172254 hasConcept C106159729 @default.
- W2091172254 hasConcept C111771559 @default.
- W2091172254 hasConcept C136525101 @default.
- W2091172254 hasConcept C142724271 @default.
- W2091172254 hasConcept C162117346 @default.
- W2091172254 hasConcept C162324750 @default.
- W2091172254 hasConcept C162862793 @default.
- W2091172254 hasConcept C171250308 @default.
- W2091172254 hasConcept C178790620 @default.
- W2091172254 hasConcept C185592680 @default.
- W2091172254 hasConcept C192562407 @default.
- W2091172254 hasConcept C200274948 @default.
- W2091172254 hasConcept C204787440 @default.
- W2091172254 hasConcept C2779227376 @default.
- W2091172254 hasConcept C53524968 @default.
- W2091172254 hasConcept C71924100 @default.
- W2091172254 hasConcept C75473681 @default.
- W2091172254 hasConceptScore W2091172254C100460472 @default.
- W2091172254 hasConceptScore W2091172254C106159729 @default.
- W2091172254 hasConceptScore W2091172254C111771559 @default.
- W2091172254 hasConceptScore W2091172254C136525101 @default.
- W2091172254 hasConceptScore W2091172254C142724271 @default.
- W2091172254 hasConceptScore W2091172254C162117346 @default.
- W2091172254 hasConceptScore W2091172254C162324750 @default.
- W2091172254 hasConceptScore W2091172254C162862793 @default.
- W2091172254 hasConceptScore W2091172254C171250308 @default.
- W2091172254 hasConceptScore W2091172254C178790620 @default.
- W2091172254 hasConceptScore W2091172254C185592680 @default.
- W2091172254 hasConceptScore W2091172254C192562407 @default.
- W2091172254 hasConceptScore W2091172254C200274948 @default.
- W2091172254 hasConceptScore W2091172254C204787440 @default.
- W2091172254 hasConceptScore W2091172254C2779227376 @default.
- W2091172254 hasConceptScore W2091172254C53524968 @default.
- W2091172254 hasConceptScore W2091172254C71924100 @default.
- W2091172254 hasConceptScore W2091172254C75473681 @default.
- W2091172254 hasIssue "5A" @default.
- W2091172254 hasLocation W20911722541 @default.
- W2091172254 hasOpenAccess W2091172254 @default.
- W2091172254 hasPrimaryLocation W20911722541 @default.
- W2091172254 hasRelatedWork W1946064579 @default.
- W2091172254 hasRelatedWork W1979069790 @default.
- W2091172254 hasRelatedWork W1993941659 @default.
- W2091172254 hasRelatedWork W2038772957 @default.
- W2091172254 hasRelatedWork W2064179573 @default.
- W2091172254 hasRelatedWork W2067267817 @default.
- W2091172254 hasRelatedWork W2070598240 @default.
- W2091172254 hasRelatedWork W2091172254 @default.
- W2091172254 hasRelatedWork W2163956515 @default.
- W2091172254 hasRelatedWork W2045495127 @default.
- W2091172254 hasVolume "40" @default.
- W2091172254 isParatext "false" @default.
- W2091172254 isRetracted "false" @default.
- W2091172254 magId "2091172254" @default.
- W2091172254 workType "article" @default.