FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091210972> ?p ?o ?g. }

• W2091210972 endingPage "986" @default.
• W2091210972 startingPage "976" @default.
• W2091210972 abstract "The paper presents a method for the high-resolution production of polymer nanopatterns with controllable geometrical parameters by means of a single-spot electron-beam lithography technique. The essence of the method entails the overexposure of a positive-tone resist, spin-coated onto a substrate where nanoscale spots are exposed to an electron beam with a dose greater than 0.1 pC per dot. A single-spot enables the fabrication of a nanoring, while a chain of spots placed at distance of 5-30 nm from each other allows the production of a polymer pattern of complex geometry of sub-10 nm resolution. We demonstrate that in addition to the naturally oxidized silicon substrates, gold-coated substrates can also successfully be used for the single-spot nanopattering technique. An explanation of the results related to the resist overexposure was demonstrated using Monte Carlo simulations. Our nanofabrication method significantly accelerates (up to 10 times) the fabrication rate as compared to conventional lithography on positive-tone resist. This technique can be potentially employed in the electronics industry for the production of nanoprinted lithography molds, etching masks, nanoelectronics, nanophotonics, NEMS and MEMS devices." @default.
• W2091210972 created "2016-06-24" @default.
• W2091210972 creator A5002085572 @default.
• W2091210972 creator A5003131834 @default.
• W2091210972 creator A5023159135 @default.
• W2091210972 creator A5080602068 @default.
• W2091210972 date "2015-04-17" @default.
• W2091210972 modified "2023-09-26" @default.
• W2091210972 title "Fabrication of high-resolution nanostructures of complex geometry by the single-spot nanolithography method" @default.
• W2091210972 cites W1505085631 @default.
• W2091210972 cites W1978995275 @default.
• W2091210972 cites W1989220190 @default.
• W2091210972 cites W1992529481 @default.
• W2091210972 cites W2001448866 @default.
• W2091210972 cites W2012202734 @default.
• W2091210972 cites W2018469480 @default.
• W2091210972 cites W2028192735 @default.
• W2091210972 cites W2031286167 @default.
• W2091210972 cites W2038845950 @default.
• W2091210972 cites W2041616874 @default.
• W2091210972 cites W2046786896 @default.
• W2091210972 cites W2050639691 @default.
• W2091210972 cites W2062224612 @default.
• W2091210972 cites W2062681049 @default.
• W2091210972 cites W2065145375 @default.
• W2091210972 cites W2131263864 @default.
• W2091210972 cites W2153444230 @default.
• W2091210972 cites W4211238785 @default.
• W2091210972 cites W4302083512 @default.
• W2091210972 cites W81693912 @default.
• W2091210972 cites W2026861381 @default.
• W2091210972 doi "https://doi.org/10.3762/bjnano.6.101" @default.
• W2091210972 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4419585" @default.
• W2091210972 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25977869" @default.
• W2091210972 hasPublicationYear "2015" @default.
• W2091210972 type Work @default.
• W2091210972 sameAs 2091210972 @default.
• W2091210972 citedByCount "5" @default.
• W2091210972 countsByYear W20912109722016 @default.
• W2091210972 countsByYear W20912109722017 @default.
• W2091210972 countsByYear W20912109722022 @default.
• W2091210972 crossrefType "journal-article" @default.
• W2091210972 hasAuthorship W2091210972A5002085572 @default.
• W2091210972 hasAuthorship W2091210972A5003131834 @default.
• W2091210972 hasAuthorship W2091210972A5023159135 @default.
• W2091210972 hasAuthorship W2091210972A5080602068 @default.
• W2091210972 hasBestOaLocation W20912109721 @default.
• W2091210972 hasConcept C100460472 @default.
• W2091210972 hasConcept C105487726 @default.
• W2091210972 hasConcept C111368507 @default.
• W2091210972 hasConcept C127313418 @default.
• W2091210972 hasConcept C136525101 @default.
• W2091210972 hasConcept C141400236 @default.
• W2091210972 hasConcept C142724271 @default.
• W2091210972 hasConcept C162117346 @default.
• W2091210972 hasConcept C171250308 @default.
• W2091210972 hasConcept C192562407 @default.
• W2091210972 hasConcept C200274948 @default.
• W2091210972 hasConcept C204223013 @default.
• W2091210972 hasConcept C204787440 @default.
• W2091210972 hasConcept C2777289219 @default.
• W2091210972 hasConcept C2779227376 @default.
• W2091210972 hasConcept C49040817 @default.
• W2091210972 hasConcept C53524968 @default.
• W2091210972 hasConcept C544956773 @default.
• W2091210972 hasConcept C70520399 @default.
• W2091210972 hasConcept C71924100 @default.
• W2091210972 hasConceptScore W2091210972C100460472 @default.
• W2091210972 hasConceptScore W2091210972C105487726 @default.
• W2091210972 hasConceptScore W2091210972C111368507 @default.
• W2091210972 hasConceptScore W2091210972C127313418 @default.
• W2091210972 hasConceptScore W2091210972C136525101 @default.
• W2091210972 hasConceptScore W2091210972C141400236 @default.
• W2091210972 hasConceptScore W2091210972C142724271 @default.
• W2091210972 hasConceptScore W2091210972C162117346 @default.
• W2091210972 hasConceptScore W2091210972C171250308 @default.
• W2091210972 hasConceptScore W2091210972C192562407 @default.
• W2091210972 hasConceptScore W2091210972C200274948 @default.
• W2091210972 hasConceptScore W2091210972C204223013 @default.
• W2091210972 hasConceptScore W2091210972C204787440 @default.
• W2091210972 hasConceptScore W2091210972C2777289219 @default.
• W2091210972 hasConceptScore W2091210972C2779227376 @default.
• W2091210972 hasConceptScore W2091210972C49040817 @default.
• W2091210972 hasConceptScore W2091210972C53524968 @default.
• W2091210972 hasConceptScore W2091210972C544956773 @default.
• W2091210972 hasConceptScore W2091210972C70520399 @default.
• W2091210972 hasConceptScore W2091210972C71924100 @default.
• W2091210972 hasLocation W20912109721 @default.
• W2091210972 hasLocation W20912109722 @default.
• W2091210972 hasLocation W20912109723 @default.
• W2091210972 hasLocation W20912109724 @default.
• W2091210972 hasOpenAccess W2091210972 @default.
• W2091210972 hasPrimaryLocation W20912109721 @default.
• W2091210972 hasRelatedWork W1534103146 @default.
• W2091210972 hasRelatedWork W1979496026 @default.
• W2091210972 hasRelatedWork W1983850620 @default.
• W2091210972 hasRelatedWork W2003241729 @default.
• W2091210972 hasRelatedWork W2004964594 @default.

• next