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• W2091214464 abstract "International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 163-168 (2003) Invited PaperNo AccessPIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS FOR RF FILTERING AND ULTRASONIC IMAGINGPAUL MURALTPAUL MURALTCeramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland Search for more papers by this author https://doi.org/10.1142/S1465876303000843Cited by:6 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractA review is given on micromachined ultrasonic transducers based on piezoelectric thin films. Applications in rf filtering and ultrasonic imaging are discussed. Some recent research results are presented.Keywords:MUT'sPZTBAWAlN References J. D. Larson, R. Ruby, P. D. Bradley, J. Wen, S.-L. Kok, and A. Chien, Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band, Proceedings of IEEE Ultrasonics Symposium, 2000, pp. 869-74 . Google ScholarK. M. Lakin, K. T. McCarron and R. E. Rose, Proceedings of IEEE Ultrasonics Symposium (IEEE, 1995) pp. 905–908. Google ScholarR. Farlowet al., IEEE Trans. UFFC 48, 639 (2001). Crossref, Google ScholarC. M. Hanson, Semiconductors and Semimetals 47, 123 (1997). Crossref, Google ScholarJ. J. Bernsteinet al., IEEE Trans. UFFC 44, 960 (1997). Crossref, Google ScholarO. Oralkanet al., IEEE Trans. UFFC 46, (1999). Google ScholarJ. Johnsonet al., Ultrasonics 40, 471 (2002). Crossref, Google ScholarN. Ledermannet al., Sensors and Actuators A 105, 162 (2003). Crossref, Google ScholarP. Muraltet al., Sensors and Actuators A 53, 397 (1996). Google ScholarS. Hiboux, P. Muralt and N. Setter, MRS Symp. Proc. 596, 499 (2000). Crossref, Google Scholar T. Iijima, S. Ito, H. Matsuda, R. Dugnani, and F.-K. Chang, Preparation of disk-shape 11 μm thick PZT films and its ferroelectric and piezoelectric properties, Proceedings of Micormachined Ultrasonic Transucers. 2003. Lausanne (Switzerland). . Google ScholarP. Muralt, Integrated Ferroelectrics 17, 297 (1997). Crossref, Google ScholarM.-A. Dubois and P. Muralt, IEEE Transactions on Ultrasonics, Ferroelectrics and Fequency control 45, 1169 (1998). Crossref, Google ScholarP. Muralt, N. Ledermann and J. Baborowski, Piezoelectric micromachined ultrasonics transducers (PMUT's) based on PZT thin films, Proceedings of IEEE Ultrasonics Symposium 2002 (IEEE, Germany) p. 5E-3. Google ScholarS. G. Bums, R. J. Weber and S. D. Brayman, Proceedings of 45th annual symposium on frequency control (IEEE, 1991) p. 207, 11. Google ScholarA. Ballato, IEEE Trans. UFFC 41, 834 (1994). Crossref, Google ScholarM.-A. Dubois and P. Muralt, Appl. Phys. Lett. 74, 3032 (1999). Crossref, Google Scholar R. Lanz, M.-A. Dubois, and P. Muralt, Solidly mounted BAW filters for the 6 to 8 Ghz range based on AlN thin films, Proceedings of IEEE Ultrasonics Symposium. 2001. Atlanta (USA) . Google Scholar F. Martin, P. Muralt, M.-A. Dubois, and A. Pezous, Thickness dependence of properties of highly c-axis textured AlN thin films, to be published (2004) . Google Scholar R. Lanz and P. Muralt, Solidly mounted 8 GHz filters based on AlN thin films, Proceedings of MEMSWAVE. 2002. Toulouse . Google ScholarM.-A. Dubois and P. Muralt, J. Appl. Phys. 89, 6389 (2001). Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 6Review of pMUTs for medical imaging: towards high frequency arraysAtheeth S, Kajoli Krishnan and Manish Arora12 January 2023 | Biomedical Physics & Engineering Express, Vol. 9, No. 2Nanocrystalline Diamond Coatings12 Dec 2016Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS ApplicationsAnirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan and James E. Butler31 January 2011 | MRS Bulletin, Vol. 35, No. 4Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devicesO. Auciello, A.V. Sumant, J. Hiller, B. Kabius and Z. Ma et al.1 Feb 2008Are Diamonds a MEMS' Best Friend?Orlando Auciello, Sergio Pacheco, Anirudha Sumant, Chris Gudeman and Suresh Sampath et al.1 Dec 2007 | IEEE Microwave Magazine, Vol. 8, No. 6Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systemsS. Srinivasan, J. Hiller, B. Kabius and O. Auciello26 Mar 2007 | Applied Physics Letters, Vol. 90, No. 13 Recommended Vol. 04, No. 02 Metrics History KeywordsMUT'sPZTBAWAlNPDF download" @default.
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