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• W2091239507 abstract "A consistent theoretical analysis of a low-pressure (pD 1 Torr) microwave discharge (!=2D 433 MHz and 2450 MHz) in O2-N2 is presented. The model is based on the coupled solutions to the homogeneous electron Boltzmann equation and a system of rate balance equations for the dominant neutral and charged particles in the discharge. The sustaining electric field is self-consistently derived from the set of continuity and momentum transfer equations for electrons and ions O + ,O + ,N O + ,N + ,N + and O.A deviation from the classical ambipolar diffusion is observed due to the presence of O ions. The recombination of O. 3 P/ atoms on the tube walls is taken into account through a Monte-Carlo-like simulation of a sequence of elementary surface processes. This formulation provides results for the mean input power absorbed from the field per electron, , and for the concentrations of O2.a 1 1g/ and O. 3 P/ in satisfactory agreement with measured data. Other important calculated data such as the concentrations of the ionic species and the percentage contributions of the various ionization mechanisms are also reported." @default.
• W2091239507 created "2016-06-24" @default.
• W2091239507 creator A5023224975 @default.
• W2091239507 creator A5050777332 @default.
• W2091239507 date "1999-01-01" @default.
• W2091239507 modified "2023-10-09" @default.
• W2091239507 title "Kinetic model of a low-pressure microwave discharge in O₂-H₂including the effects of O^-ions on the characteristics for plasma maintenance" @default.
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• W2091239507 doi "https://doi.org/10.1088/0963-0252/8/1/014" @default.
• W2091239507 hasPublicationYear "1999" @default.
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