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- W2091269461 abstract "A laser-beam writing system is developed for large-area optical waveguide fabrication. Single-mode embedded channel optical waveguides are successfully fabricated on both 4 and 8 in silicon substrates using deuterated fluoromethacrylate polymers by laser-beam writing in photoresist and dry etching. The propagation loss of the waveguides is as low as 0.1 dB/cm at 1.3 µm." @default.
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- W2091269461 date "1995-12-07" @default.
- W2091269461 modified "2023-09-27" @default.
- W2091269461 title "Fabrication of single-mode polymeric optical waveguides by laser-beam writing" @default.
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- W2091269461 doi "https://doi.org/10.1049/el:19951515" @default.
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