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- W2091277829 abstract "A simple process using a shadow mask is described to fabricate Pd/Ni resistors for detecting . The performance of the resistive sensors is studied in relation to annealing the devices at different temperatures in 2% in for 2 h. The Pd/Ni film surface morphology is also examined in relation to the resistor response when exposed to . The detailed information learned about the performance of the prototype resistors is used to fabricate wide‐range‐hydrogen microsensors, which combine a Pd/Ni chemiresistor and metal‐oxide semiconductor capacitor along with a thin film metal heater and temperature sensor. These studies provide an important step for improving the reliability of microsensors used to detect over concentrations ranging from 1 mTorr to 700 Torr." @default.
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- W2091277829 date "1997-09-01" @default.
- W2091277829 modified "2023-09-29" @default.
- W2091277829 title "Sensors for Detecting Molecular Hydrogen Based on Pd Metal Alloys" @default.
- W2091277829 doi "https://doi.org/10.1149/1.1837991" @default.
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