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- W2091278141 abstract "We demonstrated diamond processing using a variable pressure scanning electron microscope. Dents were formed in diamond by electron beam irradiation in air, nitrogen gas, oxygen gas, and water vapor. The processing in oxygen atmosphere showed the highest efficiency. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. We used this method to remove residue on a diamond device, which showed that it is practical for fabricating diamond-based nano-devices." @default.
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- W2091278141 date "2006-01-06" @default.
- W2091278141 modified "2023-09-25" @default.
- W2091278141 title "Nanoprocessing of Diamond Using a Variable Pressure Scanning Electron Microscope" @default.
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- W2091278141 doi "https://doi.org/10.1143/jjap.45.l71" @default.
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