Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091280413> ?p ?o ?g. }
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- W2091280413 endingPage "5750" @default.
- W2091280413 startingPage "5744" @default.
- W2091280413 abstract "We measured the mechanical properties of dense and porous polymeric films, the modified polyarylethers, which have a low dielectric constant varying from 2.7 to 1.8, by combining three different methods; membrane bulge test, nanoindentation, and single-substrate bending beam method. The elastic modulus and initial stress measured from these three methods are in good agreement. The substrate effect was observed in the measurements by nanoindentation. Data obtained by nanoindentation show a significant dependence on the film thickness and the displacement depth of the indenter. However, the hardness of the low dielectric constant thin film does not depend on thickness and only slightly depends on the indentation depth. A tentative analysis is proposed to explain the results." @default.
- W2091280413 created "2016-06-24" @default.
- W2091280413 creator A5000675086 @default.
- W2091280413 creator A5002895910 @default.
- W2091280413 creator A5018800820 @default.
- W2091280413 creator A5032851086 @default.
- W2091280413 creator A5052329026 @default.
- W2091280413 creator A5056697599 @default.
- W2091280413 creator A5061216998 @default.
- W2091280413 creator A5063759133 @default.
- W2091280413 creator A5065652371 @default.
- W2091280413 date "2000-11-15" @default.
- W2091280413 modified "2023-09-23" @default.
- W2091280413 title "Measurement of mechanical properties for dense and porous polymer films having a low dielectric constant" @default.
- W2091280413 cites W1979525535 @default.
- W2091280413 cites W1995209717 @default.
- W2091280413 cites W2023450295 @default.
- W2091280413 cites W2027968656 @default.
- W2091280413 cites W2050240486 @default.
- W2091280413 cites W2086933933 @default.
- W2091280413 cites W2944728552 @default.
- W2091280413 doi "https://doi.org/10.1063/1.1287756" @default.
- W2091280413 hasPublicationYear "2000" @default.
- W2091280413 type Work @default.
- W2091280413 sameAs 2091280413 @default.
- W2091280413 citedByCount "17" @default.
- W2091280413 countsByYear W20912804132015 @default.
- W2091280413 countsByYear W20912804132017 @default.
- W2091280413 countsByYear W20912804132021 @default.
- W2091280413 countsByYear W20912804132022 @default.
- W2091280413 crossrefType "journal-article" @default.
- W2091280413 hasAuthorship W2091280413A5000675086 @default.
- W2091280413 hasAuthorship W2091280413A5002895910 @default.
- W2091280413 hasAuthorship W2091280413A5018800820 @default.
- W2091280413 hasAuthorship W2091280413A5032851086 @default.
- W2091280413 hasAuthorship W2091280413A5052329026 @default.
- W2091280413 hasAuthorship W2091280413A5056697599 @default.
- W2091280413 hasAuthorship W2091280413A5061216998 @default.
- W2091280413 hasAuthorship W2091280413A5063759133 @default.
- W2091280413 hasAuthorship W2091280413A5065652371 @default.
- W2091280413 hasBestOaLocation W20912804132 @default.
- W2091280413 hasConcept C111368507 @default.
- W2091280413 hasConcept C127313418 @default.
- W2091280413 hasConcept C133386390 @default.
- W2091280413 hasConcept C159985019 @default.
- W2091280413 hasConcept C168651791 @default.
- W2091280413 hasConcept C192562407 @default.
- W2091280413 hasConcept C193867417 @default.
- W2091280413 hasConcept C2777289219 @default.
- W2091280413 hasConcept C2779866884 @default.
- W2091280413 hasConcept C2780902562 @default.
- W2091280413 hasConcept C43486711 @default.
- W2091280413 hasConcept C49040817 @default.
- W2091280413 hasConcept C49326732 @default.
- W2091280413 hasConcept C6648577 @default.
- W2091280413 hasConcept C87210426 @default.
- W2091280413 hasConceptScore W2091280413C111368507 @default.
- W2091280413 hasConceptScore W2091280413C127313418 @default.
- W2091280413 hasConceptScore W2091280413C133386390 @default.
- W2091280413 hasConceptScore W2091280413C159985019 @default.
- W2091280413 hasConceptScore W2091280413C168651791 @default.
- W2091280413 hasConceptScore W2091280413C192562407 @default.
- W2091280413 hasConceptScore W2091280413C193867417 @default.
- W2091280413 hasConceptScore W2091280413C2777289219 @default.
- W2091280413 hasConceptScore W2091280413C2779866884 @default.
- W2091280413 hasConceptScore W2091280413C2780902562 @default.
- W2091280413 hasConceptScore W2091280413C43486711 @default.
- W2091280413 hasConceptScore W2091280413C49040817 @default.
- W2091280413 hasConceptScore W2091280413C49326732 @default.
- W2091280413 hasConceptScore W2091280413C6648577 @default.
- W2091280413 hasConceptScore W2091280413C87210426 @default.
- W2091280413 hasIssue "10" @default.
- W2091280413 hasLocation W20912804131 @default.
- W2091280413 hasLocation W20912804132 @default.
- W2091280413 hasOpenAccess W2091280413 @default.
- W2091280413 hasPrimaryLocation W20912804131 @default.
- W2091280413 hasRelatedWork W1991795642 @default.
- W2091280413 hasRelatedWork W2023978287 @default.
- W2091280413 hasRelatedWork W2085878015 @default.
- W2091280413 hasRelatedWork W2102505707 @default.
- W2091280413 hasRelatedWork W2113063288 @default.
- W2091280413 hasRelatedWork W2383168126 @default.
- W2091280413 hasRelatedWork W2441926271 @default.
- W2091280413 hasRelatedWork W2919445107 @default.
- W2091280413 hasRelatedWork W2981110987 @default.
- W2091280413 hasRelatedWork W3144697170 @default.
- W2091280413 hasVolume "88" @default.
- W2091280413 isParatext "false" @default.
- W2091280413 isRetracted "false" @default.
- W2091280413 magId "2091280413" @default.
- W2091280413 workType "article" @default.