Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091423594> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2091423594 abstract "Electron beam lithography (EBL) is widely used in nano-scale device fabrication and research due to high resolution and excellent flexibility. In this paper, nanometer EBL system based on scanning electron microscope (SEM) is introduced. Its main components include a modified SEM, a laser interferometer controlled stage, a versatile high speed pattern generator, and a fully functional and easy-operational software system. In order to explain this EBL system design principle, realization method, this paper mainly introduces each component’s design basis, main structures and functions. Stitching experiments overlay experiments and arbitrary shape patterns exposure experiments have been done on this EBL system based on JSM-35CF SEM. The lithography results demonstrate that the resolution of electron beam lithography system can approach nanometer. This kind of EBL system based on SEM can meet the need of micro-nanofabrication research and design activities at flexibility and low price. DOI : http://dx.doi.org/10.11591/telkomnika.v12i5.4473" @default.
- W2091423594 created "2016-06-24" @default.
- W2091423594 creator A5017947172 @default.
- W2091423594 creator A5027175563 @default.
- W2091423594 creator A5047041033 @default.
- W2091423594 date "2014-05-01" @default.
- W2091423594 modified "2023-09-24" @default.
- W2091423594 title "Flexible Nanofabrication Equipment: E-beam Lithography System Based on SEM" @default.
- W2091423594 cites W1972634280 @default.
- W2091423594 cites W1978153237 @default.
- W2091423594 cites W1979910832 @default.
- W2091423594 cites W1990909305 @default.
- W2091423594 cites W2006884043 @default.
- W2091423594 cites W2009300578 @default.
- W2091423594 cites W2011524942 @default.
- W2091423594 cites W2037537680 @default.
- W2091423594 cites W2049285197 @default.
- W2091423594 cites W2057288436 @default.
- W2091423594 cites W2125856830 @default.
- W2091423594 cites W2129216969 @default.
- W2091423594 cites W2148582029 @default.
- W2091423594 cites W2154744502 @default.
- W2091423594 cites W2375793688 @default.
- W2091423594 cites W2387958601 @default.
- W2091423594 doi "https://doi.org/10.11591/telkomnika.v12i5.4473" @default.
- W2091423594 hasPublicationYear "2014" @default.
- W2091423594 type Work @default.
- W2091423594 sameAs 2091423594 @default.
- W2091423594 citedByCount "0" @default.
- W2091423594 crossrefType "journal-article" @default.
- W2091423594 hasAuthorship W2091423594A5017947172 @default.
- W2091423594 hasAuthorship W2091423594A5027175563 @default.
- W2091423594 hasAuthorship W2091423594A5047041033 @default.
- W2091423594 hasConcept C136525101 @default.
- W2091423594 hasConcept C142724271 @default.
- W2091423594 hasConcept C162117346 @default.
- W2091423594 hasConcept C171250308 @default.
- W2091423594 hasConcept C192562407 @default.
- W2091423594 hasConcept C200274948 @default.
- W2091423594 hasConcept C204223013 @default.
- W2091423594 hasConcept C204787440 @default.
- W2091423594 hasConcept C2779227376 @default.
- W2091423594 hasConcept C49040817 @default.
- W2091423594 hasConcept C53524968 @default.
- W2091423594 hasConcept C71924100 @default.
- W2091423594 hasConceptScore W2091423594C136525101 @default.
- W2091423594 hasConceptScore W2091423594C142724271 @default.
- W2091423594 hasConceptScore W2091423594C162117346 @default.
- W2091423594 hasConceptScore W2091423594C171250308 @default.
- W2091423594 hasConceptScore W2091423594C192562407 @default.
- W2091423594 hasConceptScore W2091423594C200274948 @default.
- W2091423594 hasConceptScore W2091423594C204223013 @default.
- W2091423594 hasConceptScore W2091423594C204787440 @default.
- W2091423594 hasConceptScore W2091423594C2779227376 @default.
- W2091423594 hasConceptScore W2091423594C49040817 @default.
- W2091423594 hasConceptScore W2091423594C53524968 @default.
- W2091423594 hasConceptScore W2091423594C71924100 @default.
- W2091423594 hasIssue "5" @default.
- W2091423594 hasLocation W20914235941 @default.
- W2091423594 hasOpenAccess W2091423594 @default.
- W2091423594 hasPrimaryLocation W20914235941 @default.
- W2091423594 hasRelatedWork W126031771 @default.
- W2091423594 hasRelatedWork W2008754091 @default.
- W2091423594 hasRelatedWork W2039969115 @default.
- W2091423594 hasRelatedWork W2055565127 @default.
- W2091423594 hasRelatedWork W2114225701 @default.
- W2091423594 hasRelatedWork W2234767249 @default.
- W2091423594 hasRelatedWork W2553034578 @default.
- W2091423594 hasRelatedWork W2948860538 @default.
- W2091423594 hasRelatedWork W4211264889 @default.
- W2091423594 hasRelatedWork W4220945384 @default.
- W2091423594 hasVolume "12" @default.
- W2091423594 isParatext "false" @default.
- W2091423594 isRetracted "false" @default.
- W2091423594 magId "2091423594" @default.
- W2091423594 workType "article" @default.