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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091483886> ?p ?o ?g. }

• W2091483886 endingPage "243" @default.
• W2091483886 startingPage "242" @default.
• W2091483886 abstract "Single crystalline 3C-SiC films were grown on a Si substrate by molecular beam epitaxy (MBE) using SiHCl3 and C2H4 gases. The optimal growth conditions were achieved at a growth temperature (Tsub ) of 1000 °C and a gas pressure ratio (PSiHCl3 /PC2H4 ) of 1/3 at PSiHCl3 =1×10−5 Torr. Prior to the essential growth of SiC, a carbonization process was performed with C2H4 gas only. A continuous observation by reflection high-energy electron diffraction (RHEED) was performed throughout the process of crystal growth. A series of RHEED patterns revealed that carbonization film could be grown at 750 °C and the lattice mismatch between Si and SiC crystals was satisfactorily relaxed. All processes of crystal growth were performed at a relatively low temperature." @default.
• W2091483886 created "2016-06-24" @default.
• W2091483886 creator A5037834035 @default.
• W2091483886 creator A5071228554 @default.
• W2091483886 date "1989-01-16" @default.
• W2091483886 modified "2023-10-09" @default.
• W2091483886 title "Low-temperature growth of 3C-SiC by the gas source molecular beam epitaxial method" @default.
• W2091483886 cites W1976917645 @default.
• W2091483886 cites W2008924171 @default.
• W2091483886 cites W2023631977 @default.
• W2091483886 cites W2027968453 @default.
• W2091483886 cites W2031522718 @default.
• W2091483886 cites W2061626609 @default.
• W2091483886 doi "https://doi.org/10.1063/1.101001" @default.
• W2091483886 hasPublicationYear "1989" @default.
• W2091483886 type Work @default.
• W2091483886 sameAs 2091483886 @default.
• W2091483886 citedByCount "39" @default.
• W2091483886 countsByYear W20914838862012 @default.
• W2091483886 countsByYear W20914838862013 @default.
• W2091483886 countsByYear W20914838862014 @default.
• W2091483886 countsByYear W20914838862015 @default.
• W2091483886 countsByYear W20914838862021 @default.
• W2091483886 crossrefType "journal-article" @default.
• W2091483886 hasAuthorship W2091483886A5037834035 @default.
• W2091483886 hasAuthorship W2091483886A5071228554 @default.
• W2091483886 hasConcept C110738630 @default.
• W2091483886 hasConcept C111368507 @default.
• W2091483886 hasConcept C113196181 @default.
• W2091483886 hasConcept C120665830 @default.
• W2091483886 hasConcept C121332964 @default.
• W2091483886 hasConcept C127313418 @default.
• W2091483886 hasConcept C154877778 @default.
• W2091483886 hasConcept C159985019 @default.
• W2091483886 hasConcept C171250308 @default.
• W2091483886 hasConcept C178790620 @default.
• W2091483886 hasConcept C185592680 @default.
• W2091483886 hasConcept C19067145 @default.
• W2091483886 hasConcept C192562407 @default.
• W2091483886 hasConcept C199360897 @default.
• W2091483886 hasConcept C200096950 @default.
• W2091483886 hasConcept C207114421 @default.
• W2091483886 hasConcept C26456737 @default.
• W2091483886 hasConcept C26771246 @default.
• W2091483886 hasConcept C2777289219 @default.
• W2091483886 hasConcept C2779227376 @default.
• W2091483886 hasConcept C2781285689 @default.
• W2091483886 hasConcept C30646810 @default.
• W2091483886 hasConcept C3792809 @default.
• W2091483886 hasConcept C41008148 @default.
• W2091483886 hasConcept C77557913 @default.
• W2091483886 hasConcept C8010536 @default.
• W2091483886 hasConcept C97355855 @default.
• W2091483886 hasConceptScore W2091483886C110738630 @default.
• W2091483886 hasConceptScore W2091483886C111368507 @default.
• W2091483886 hasConceptScore W2091483886C113196181 @default.
• W2091483886 hasConceptScore W2091483886C120665830 @default.
• W2091483886 hasConceptScore W2091483886C121332964 @default.
• W2091483886 hasConceptScore W2091483886C127313418 @default.
• W2091483886 hasConceptScore W2091483886C154877778 @default.
• W2091483886 hasConceptScore W2091483886C159985019 @default.
• W2091483886 hasConceptScore W2091483886C171250308 @default.
• W2091483886 hasConceptScore W2091483886C178790620 @default.
• W2091483886 hasConceptScore W2091483886C185592680 @default.
• W2091483886 hasConceptScore W2091483886C19067145 @default.
• W2091483886 hasConceptScore W2091483886C192562407 @default.
• W2091483886 hasConceptScore W2091483886C199360897 @default.
• W2091483886 hasConceptScore W2091483886C200096950 @default.
• W2091483886 hasConceptScore W2091483886C207114421 @default.
• W2091483886 hasConceptScore W2091483886C26456737 @default.
• W2091483886 hasConceptScore W2091483886C26771246 @default.
• W2091483886 hasConceptScore W2091483886C2777289219 @default.
• W2091483886 hasConceptScore W2091483886C2779227376 @default.
• W2091483886 hasConceptScore W2091483886C2781285689 @default.
• W2091483886 hasConceptScore W2091483886C30646810 @default.
• W2091483886 hasConceptScore W2091483886C3792809 @default.
• W2091483886 hasConceptScore W2091483886C41008148 @default.
• W2091483886 hasConceptScore W2091483886C77557913 @default.
• W2091483886 hasConceptScore W2091483886C8010536 @default.
• W2091483886 hasConceptScore W2091483886C97355855 @default.
• W2091483886 hasIssue "3" @default.
• W2091483886 hasLocation W20914838861 @default.
• W2091483886 hasOpenAccess W2091483886 @default.
• W2091483886 hasPrimaryLocation W20914838861 @default.
• W2091483886 hasRelatedWork W1820058048 @default.
• W2091483886 hasRelatedWork W1966548408 @default.
• W2091483886 hasRelatedWork W1968296297 @default.
• W2091483886 hasRelatedWork W2028789408 @default.
• W2091483886 hasRelatedWork W2044856226 @default.
• W2091483886 hasRelatedWork W2057869304 @default.
• W2091483886 hasRelatedWork W2061854419 @default.
• W2091483886 hasRelatedWork W2062436698 @default.
• W2091483886 hasRelatedWork W2080290649 @default.
• W2091483886 hasRelatedWork W2316813269 @default.
• W2091483886 hasVolume "54" @default.
• W2091483886 isParatext "false" @default.
• W2091483886 isRetracted "false" @default.
• W2091483886 magId "2091483886" @default.

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