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• W2091497874 abstract "Attempts made in past to detect target gases using semiconductor structure required high operational temperature. Whereas, in the present study, our research group could detect CO2 gas at room temperature without using vacuum condition. For this purpose, a micro-fabricated device was made with simple MIS structure having Pd/TiO2/SiO2/Si-wafer/Al layers. The sensing performance of device was dependant on Pd–TiO2 catalytic sensing layer quality because the role of TiO2 layer was to reduce work function barrier between palladium and SiO2 layer. The TiO2 layer prepared by sintering at 500 °C or above showed anatase phase in XRD analysis. By using this device we could detect between 2.5% and 12.5% CO2." @default.
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• W2091497874 date "2009-04-01" @default.
• W2091497874 modified "2023-10-17" @default.
• W2091497874 title "Catalytic Pd–TiO2 thin film based fire detector to operate at room temperature" @default.
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• W2091497874 doi "https://doi.org/10.1016/j.mee.2009.02.014" @default.
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