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- W2091522379 abstract "We report on the fabrication of 2-D photonic crystal (PC) micro-mirrors, and Finite Difference Time Domain (FDTD) simulations and measurements of their reflectance spectra and polarization dependence at normal incidence. The PC mirrors were fabricated in free-standing thin polysilicon membranes supported by silicon nitride films for stress compensation. Greater than 90% reflectivity is measured over a wavelength range of 35 nm from 1565 nm to 1600 nm with small polarization dependence. Our FDTD simulations show that fabrication errors on the order of tens of nanometers can strongly affect the reflection spectra. When the fabrication errors are kept below this level, FDTD simulations on perfectly periodic structures accurately predict the reflection spectra of the fabricated PC mirrors, despite their sensitivity to the fabrication errors." @default.
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- W2091522379 date "2012-03-05" @default.
- W2091522379 modified "2023-09-25" @default.
- W2091522379 title "Reflectivity and polarization dependence of polysilicon single-film broadband photonic crystal micro-mirrors" @default.
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- W2091522379 doi "https://doi.org/10.1364/oe.20.006306" @default.
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