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- W2091590577 abstract "Self-sensing piezoelectric microcantilevers do not require alignment of external optics, use very little power and are well suited to array applications. We demonstrate a commercially available, piezoelectric cantilever as a mercury vapor detector. The cantilever is an atomic force microscopy cantilever with self-sensing and self-actuating capabilities. In the first detection technique, adsorption-induced bending, caused by mercury adsorption onto gold on the cantilever, is measured by bringing the resonating cantilever into intermittent contact with a reference surface. Cantilever bending causes changes in its oscillatory amplitude, detected using the voltage output of the piezoelectric film, and a piezotube in feedback is adjusted to compensate. A 50 ppb mercury concentration in nitrogen gas was detected. The second technique capitalizes on the stiffening effect adsorbed gold has on the cantilever; natural frequency changes are detected with the piezoelectric cantilever in conjunction with a bridge circuit and amplifier. A mercury concentration of 93 ppb in nitrogen is detected. These techniques are discussed and compared. Additionally, consideration is given to the effect of the location and size of the gold-adsorption pad on sensitivity." @default.
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- W2091590577 date "2003-01-01" @default.
- W2091590577 modified "2023-10-13" @default.
- W2091590577 title "Comparison of Self-Sensing Techniques for Mercury Vapor Detection Using Piezoelectric Microcantilevers" @default.
- W2091590577 doi "https://doi.org/10.1115/imece2003-55024" @default.
- W2091590577 hasPublicationYear "2003" @default.
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