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- W2091655237 abstract "The deposition of residually stressed films in semiconductor manufacturing processes introduces elastic distortions in the wafer that can contribute to overlay errors in lithographic patterning. The distortion induced by film deposition causes out-of-plane distortion (i.e. wafer shape) that can be measured with commercial metrology tools as well as in-plane distortion that leads to overlay errors. In the present work, overlay errors and out-of-plane distortion of wafers resulting from residual stresses that are non-uniform over the area of wafer are examined using computational mechanics modeling. The results of these simulations are used to examine the correlations between wafer shape features and overlay errors. Specifically, connections between overlay errors and metrics based on the slope of the wafer shape are assessed." @default.
- W2091655237 created "2016-06-24" @default.
- W2091655237 creator A5022108747 @default.
- W2091655237 creator A5078442545 @default.
- W2091655237 creator A5079094488 @default.
- W2091655237 date "2011-03-17" @default.
- W2091655237 modified "2023-09-27" @default.
- W2091655237 title "Simulation of non-uniform wafer geometry and thin film residual stress on overlay errors" @default.
- W2091655237 doi "https://doi.org/10.1117/12.879493" @default.
- W2091655237 hasPublicationYear "2011" @default.
- W2091655237 type Work @default.
- W2091655237 sameAs 2091655237 @default.
- W2091655237 citedByCount "2" @default.
- W2091655237 countsByYear W20916552372012 @default.
- W2091655237 countsByYear W20916552372016 @default.
- W2091655237 crossrefType "proceedings-article" @default.
- W2091655237 hasAuthorship W2091655237A5022108747 @default.
- W2091655237 hasAuthorship W2091655237A5078442545 @default.
- W2091655237 hasAuthorship W2091655237A5079094488 @default.
- W2091655237 hasConcept C120665830 @default.
- W2091655237 hasConcept C121332964 @default.
- W2091655237 hasConcept C126780896 @default.
- W2091655237 hasConcept C127313418 @default.
- W2091655237 hasConcept C136085584 @default.
- W2091655237 hasConcept C151730666 @default.
- W2091655237 hasConcept C159985019 @default.
- W2091655237 hasConcept C160671074 @default.
- W2091655237 hasConcept C192562407 @default.
- W2091655237 hasConcept C194257627 @default.
- W2091655237 hasConcept C195766429 @default.
- W2091655237 hasConcept C199360897 @default.
- W2091655237 hasConcept C204223013 @default.
- W2091655237 hasConcept C2816523 @default.
- W2091655237 hasConcept C37292000 @default.
- W2091655237 hasConcept C41008148 @default.
- W2091655237 hasConcept C46362747 @default.
- W2091655237 hasConcept C49040817 @default.
- W2091655237 hasConcept C64297162 @default.
- W2091655237 hasConcept C66018809 @default.
- W2091655237 hasConceptScore W2091655237C120665830 @default.
- W2091655237 hasConceptScore W2091655237C121332964 @default.
- W2091655237 hasConceptScore W2091655237C126780896 @default.
- W2091655237 hasConceptScore W2091655237C127313418 @default.
- W2091655237 hasConceptScore W2091655237C136085584 @default.
- W2091655237 hasConceptScore W2091655237C151730666 @default.
- W2091655237 hasConceptScore W2091655237C159985019 @default.
- W2091655237 hasConceptScore W2091655237C160671074 @default.
- W2091655237 hasConceptScore W2091655237C192562407 @default.
- W2091655237 hasConceptScore W2091655237C194257627 @default.
- W2091655237 hasConceptScore W2091655237C195766429 @default.
- W2091655237 hasConceptScore W2091655237C199360897 @default.
- W2091655237 hasConceptScore W2091655237C204223013 @default.
- W2091655237 hasConceptScore W2091655237C2816523 @default.
- W2091655237 hasConceptScore W2091655237C37292000 @default.
- W2091655237 hasConceptScore W2091655237C41008148 @default.
- W2091655237 hasConceptScore W2091655237C46362747 @default.
- W2091655237 hasConceptScore W2091655237C49040817 @default.
- W2091655237 hasConceptScore W2091655237C64297162 @default.
- W2091655237 hasConceptScore W2091655237C66018809 @default.
- W2091655237 hasLocation W20916552371 @default.
- W2091655237 hasOpenAccess W2091655237 @default.
- W2091655237 hasPrimaryLocation W20916552371 @default.
- W2091655237 hasRelatedWork W1986113854 @default.
- W2091655237 hasRelatedWork W2040813044 @default.
- W2091655237 hasRelatedWork W2062194672 @default.
- W2091655237 hasRelatedWork W2068280874 @default.
- W2091655237 hasRelatedWork W2091655237 @default.
- W2091655237 hasRelatedWork W2101298999 @default.
- W2091655237 hasRelatedWork W2279895124 @default.
- W2091655237 hasRelatedWork W3130636988 @default.
- W2091655237 hasRelatedWork W3204723757 @default.
- W2091655237 hasRelatedWork W4366254129 @default.
- W2091655237 isParatext "false" @default.
- W2091655237 isRetracted "false" @default.
- W2091655237 magId "2091655237" @default.
- W2091655237 workType "article" @default.