Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091701841> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2091701841 endingPage "3917" @default.
- W2091701841 startingPage "3914" @default.
- W2091701841 abstract "Films of Cr, Mo, and W on quartz, Pyrex, Suprasil, and Al substrates were deposited by photodissociation of the respective hexacarbonyls using focused and pulsed radiation from rare-gas halide lasers. Cr was deposited by dissociation of Cr(CO)6 using XeF (308 nm), KrF (249 nm), and ArF (193 nm) lasers. Mo and W were deposited from their respective hexacarbonyls at 249 and 193 nm. Pulse energies varied between 8 and 12 mJ. Pulse rates of 10–60 Hz were used. The pulse duration was about 10 ns. Depositions with substrates both parallel and perpendicular to the excimer radiation were attempted. Only in the case of perpendicular configuration were strongly adherent films observed. The deposition rates for thicknesses up to 3000 Å appeared to be independent of the pulse rate for all three metals. The films exhibited strong adhesion to the substrate. Scanning electron microscope photographs of the films revealed the presence of continuous metal layers. Auger and x-ray analyses of the films indicated contamination from carbon and oxygen. The source of these impurities is most likely to be CO produced in the decarbonylation of the parent hexacarbonyl. Adhesion to the substrate is apparently enhanced by laser stimulated generation of strong binding sites on the surface." @default.
- W2091701841 created "2016-06-24" @default.
- W2091701841 creator A5029665331 @default.
- W2091701841 creator A5051340386 @default.
- W2091701841 creator A5083617118 @default.
- W2091701841 date "1986-06-01" @default.
- W2091701841 modified "2023-10-03" @default.
- W2091701841 title "Deposition of refractory metal films by rare-gas halide laser photodissociation of metal carbonyls" @default.
- W2091701841 cites W1963502863 @default.
- W2091701841 cites W1965873390 @default.
- W2091701841 cites W1972670983 @default.
- W2091701841 cites W1988208240 @default.
- W2091701841 cites W1988546863 @default.
- W2091701841 cites W1993360735 @default.
- W2091701841 cites W2017659318 @default.
- W2091701841 cites W2038719192 @default.
- W2091701841 cites W2067568128 @default.
- W2091701841 cites W2071694041 @default.
- W2091701841 cites W2328298691 @default.
- W2091701841 doi "https://doi.org/10.1063/1.336736" @default.
- W2091701841 hasPublicationYear "1986" @default.
- W2091701841 type Work @default.
- W2091701841 sameAs 2091701841 @default.
- W2091701841 citedByCount "69" @default.
- W2091701841 countsByYear W20917018412017 @default.
- W2091701841 countsByYear W20917018412019 @default.
- W2091701841 countsByYear W20917018412023 @default.
- W2091701841 crossrefType "journal-article" @default.
- W2091701841 hasAuthorship W2091701841A5029665331 @default.
- W2091701841 hasAuthorship W2091701841A5051340386 @default.
- W2091701841 hasAuthorship W2091701841A5083617118 @default.
- W2091701841 hasConcept C111368507 @default.
- W2091701841 hasConcept C113196181 @default.
- W2091701841 hasConcept C120665830 @default.
- W2091701841 hasConcept C121332964 @default.
- W2091701841 hasConcept C127313418 @default.
- W2091701841 hasConcept C159985019 @default.
- W2091701841 hasConcept C165176872 @default.
- W2091701841 hasConcept C171250308 @default.
- W2091701841 hasConcept C185592680 @default.
- W2091701841 hasConcept C19067145 @default.
- W2091701841 hasConcept C191897082 @default.
- W2091701841 hasConcept C192562407 @default.
- W2091701841 hasConcept C26771246 @default.
- W2091701841 hasConcept C2777289219 @default.
- W2091701841 hasConcept C2780477314 @default.
- W2091701841 hasConcept C37982897 @default.
- W2091701841 hasConcept C43617362 @default.
- W2091701841 hasConcept C520434653 @default.
- W2091701841 hasConcept C544153396 @default.
- W2091701841 hasConcept C54582936 @default.
- W2091701841 hasConcept C75473681 @default.
- W2091701841 hasConceptScore W2091701841C111368507 @default.
- W2091701841 hasConceptScore W2091701841C113196181 @default.
- W2091701841 hasConceptScore W2091701841C120665830 @default.
- W2091701841 hasConceptScore W2091701841C121332964 @default.
- W2091701841 hasConceptScore W2091701841C127313418 @default.
- W2091701841 hasConceptScore W2091701841C159985019 @default.
- W2091701841 hasConceptScore W2091701841C165176872 @default.
- W2091701841 hasConceptScore W2091701841C171250308 @default.
- W2091701841 hasConceptScore W2091701841C185592680 @default.
- W2091701841 hasConceptScore W2091701841C19067145 @default.
- W2091701841 hasConceptScore W2091701841C191897082 @default.
- W2091701841 hasConceptScore W2091701841C192562407 @default.
- W2091701841 hasConceptScore W2091701841C26771246 @default.
- W2091701841 hasConceptScore W2091701841C2777289219 @default.
- W2091701841 hasConceptScore W2091701841C2780477314 @default.
- W2091701841 hasConceptScore W2091701841C37982897 @default.
- W2091701841 hasConceptScore W2091701841C43617362 @default.
- W2091701841 hasConceptScore W2091701841C520434653 @default.
- W2091701841 hasConceptScore W2091701841C544153396 @default.
- W2091701841 hasConceptScore W2091701841C54582936 @default.
- W2091701841 hasConceptScore W2091701841C75473681 @default.
- W2091701841 hasIssue "11" @default.
- W2091701841 hasLocation W20917018411 @default.
- W2091701841 hasOpenAccess W2091701841 @default.
- W2091701841 hasPrimaryLocation W20917018411 @default.
- W2091701841 hasRelatedWork W1974615019 @default.
- W2091701841 hasRelatedWork W1981771963 @default.
- W2091701841 hasRelatedWork W2005781793 @default.
- W2091701841 hasRelatedWork W2014812224 @default.
- W2091701841 hasRelatedWork W2077925667 @default.
- W2091701841 hasRelatedWork W2084971372 @default.
- W2091701841 hasRelatedWork W2166195589 @default.
- W2091701841 hasRelatedWork W2193445377 @default.
- W2091701841 hasRelatedWork W2367947716 @default.
- W2091701841 hasRelatedWork W888185157 @default.
- W2091701841 hasVolume "59" @default.
- W2091701841 isParatext "false" @default.
- W2091701841 isRetracted "false" @default.
- W2091701841 magId "2091701841" @default.
- W2091701841 workType "article" @default.