FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2091739812> ?p ?o ?g. }

• W2091739812 endingPage "P394" @default.
• W2091739812 startingPage "P389" @default.
• W2091739812 abstract "The impact of the thermal budget on the introduction and dissociation of hydrogen-related donor profiles in high purity silicon implanted with protons in the energy range of MeV is investigated. The hydrogen-related donors are radiation-induced defect complexes decorated by the implanted hydrogen. The appearance of the donor profiles is limited to the annealing temperature regime between about 350 °C and 500 °C. The activation of the doping profiles is limited by the diffusion of the implanted hydrogen from the end-of-range region throughout the radiation-induced damage profile. This formation process is adequately described by a diffusion model with an effective activation energy of 1.2 eV. The thermal stability of the hydrogen-related donor profiles is limited by the dissociation of the donors. The deactivation of the doping is modeled by two hydrogen-related donor species with effective dissociation energies of 2.6 eV and 3 eV. The formation and dissociation mechanisms described in the present study define the upper and lower limits of the post-implantation thermal budget, respectively, for a sensible use of proton implantation doping in crystalline silicon." @default.
• W2091739812 created "2016-06-24" @default.
• W2091739812 creator A5004241832 @default.
• W2091739812 creator A5017162986 @default.
• W2091739812 creator A5032627082 @default.
• W2091739812 creator A5054952435 @default.
• W2091739812 creator A5069629086 @default.
• W2091739812 creator A5078539487 @default.
• W2091739812 date "2013-01-01" @default.
• W2091739812 modified "2023-09-27" @default.
• W2091739812 title "Activation and Dissociation of Proton-Induced Donor Profiles in Silicon" @default.
• W2091739812 cites W1968603795 @default.
• W2091739812 cites W1969635027 @default.
• W2091739812 cites W1972573062 @default.
• W2091739812 cites W1985944875 @default.
• W2091739812 cites W1993454420 @default.
• W2091739812 cites W1995576882 @default.
• W2091739812 cites W1995586028 @default.
• W2091739812 cites W1997990899 @default.
• W2091739812 cites W2002638650 @default.
• W2091739812 cites W2005428137 @default.
• W2091739812 cites W2006594064 @default.
• W2091739812 cites W2018265345 @default.
• W2091739812 cites W2018682367 @default.
• W2091739812 cites W2022371348 @default.
• W2091739812 cites W2025766719 @default.
• W2091739812 cites W2028764930 @default.
• W2091739812 cites W2034732372 @default.
• W2091739812 cites W2046018622 @default.
• W2091739812 cites W2050299434 @default.
• W2091739812 cites W2055625515 @default.
• W2091739812 cites W2060616945 @default.
• W2091739812 cites W2060826436 @default.
• W2091739812 cites W2066217415 @default.
• W2091739812 cites W2067816626 @default.
• W2091739812 cites W2069850383 @default.
• W2091739812 cites W2077955033 @default.
• W2091739812 cites W2081376438 @default.
• W2091739812 cites W2086868596 @default.
• W2091739812 cites W2087364030 @default.
• W2091739812 cites W2090992732 @default.
• W2091739812 cites W2095276981 @default.
• W2091739812 cites W2102925121 @default.
• W2091739812 cites W2135874123 @default.
• W2091739812 cites W2313977485 @default.
• W2091739812 cites W2324784691 @default.
• W2091739812 cites W2329453247 @default.
• W2091739812 cites W2330134380 @default.
• W2091739812 cites W2331234861 @default.
• W2091739812 cites W2332325860 @default.
• W2091739812 cites W4235592132 @default.
• W2091739812 doi "https://doi.org/10.1149/2.028309jss" @default.
• W2091739812 hasPublicationYear "2013" @default.
• W2091739812 type Work @default.
• W2091739812 sameAs 2091739812 @default.
• W2091739812 citedByCount "16" @default.
• W2091739812 countsByYear W20917398122014 @default.
• W2091739812 countsByYear W20917398122015 @default.
• W2091739812 countsByYear W20917398122016 @default.
• W2091739812 countsByYear W20917398122018 @default.
• W2091739812 countsByYear W20917398122019 @default.
• W2091739812 countsByYear W20917398122021 @default.
• W2091739812 countsByYear W20917398122022 @default.
• W2091739812 countsByYear W20917398122023 @default.
• W2091739812 crossrefType "journal-article" @default.
• W2091739812 hasAuthorship W2091739812A5004241832 @default.
• W2091739812 hasAuthorship W2091739812A5017162986 @default.
• W2091739812 hasAuthorship W2091739812A5032627082 @default.
• W2091739812 hasAuthorship W2091739812A5054952435 @default.
• W2091739812 hasAuthorship W2091739812A5069629086 @default.
• W2091739812 hasAuthorship W2091739812A5078539487 @default.
• W2091739812 hasConcept C102931765 @default.
• W2091739812 hasConcept C113196181 @default.
• W2091739812 hasConcept C121332964 @default.
• W2091739812 hasConcept C147789679 @default.
• W2091739812 hasConcept C159467904 @default.
• W2091739812 hasConcept C159985019 @default.
• W2091739812 hasConcept C178790620 @default.
• W2091739812 hasConcept C184779094 @default.
• W2091739812 hasConcept C185544564 @default.
• W2091739812 hasConcept C185592680 @default.
• W2091739812 hasConcept C192562407 @default.
• W2091739812 hasConcept C204530211 @default.
• W2091739812 hasConcept C2777855556 @default.
• W2091739812 hasConcept C39353612 @default.
• W2091739812 hasConcept C43617362 @default.
• W2091739812 hasConcept C49040817 @default.
• W2091739812 hasConcept C512968161 @default.
• W2091739812 hasConcept C544956773 @default.
• W2091739812 hasConcept C54516573 @default.
• W2091739812 hasConcept C57863236 @default.
• W2091739812 hasConcept C95121573 @default.
• W2091739812 hasConcept C97355855 @default.
• W2091739812 hasConceptScore W2091739812C102931765 @default.
• W2091739812 hasConceptScore W2091739812C113196181 @default.
• W2091739812 hasConceptScore W2091739812C121332964 @default.
• W2091739812 hasConceptScore W2091739812C147789679 @default.
• W2091739812 hasConceptScore W2091739812C159467904 @default.

• next