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- W2091774986 abstract "We have analyzed an asymmetric comb-drive actuator as an angular rate sensor. In common comb-drive actuator, the movable and the fixed comb-electrodes are arranged one after the other with equally interval. In our model, on the other hand, the interval is not equally; one side-to-side comb-electrode gap is smaller than another one. We calculate electrical impedance at its mechanical resonance with Colioris' force and found that the asymmetric comb-drive actuator has good sensitivity in its electrical impedance change for angular rate. We also found that the impedance of a symmetric comb-drive actuator is not a function of Colioris' force in case of small deviation approximation." @default.
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- W2091774986 date "2007-09-01" @default.
- W2091774986 modified "2023-09-26" @default.
- W2091774986 title "A proposal of gyroscope sensor using asymmetrical comb drive actuator" @default.
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- W2091774986 doi "https://doi.org/10.1109/sice.2007.4421493" @default.
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