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• W2092114607 endingPage "227" @default.
• W2092114607 startingPage "223" @default.
• W2092114607 abstract "The results of multiparameter fitting of spectroscopic ellipsometric (SE) spectra on porous silicon layers (PSL) were connected with the processing parameters (oxidation, etching time, porosity, argon implantation dose). Two optically different types of silicon forms, a bulk-type silicon (c-Si) and polycrystalline-like silicon with enhanced absorption in the grain boundaries (p-Si) needed to be mixed with voids in the appropriate ratio, and the PSL had to be divided in depth in several different sections in order to obtain the best fit. The sectioning reflects the effect of upper and lower interfaces or inhomogeneity in depth. The effective porosity and the sublayer thicknesses are determined with high precision. In the case of argon implantation, we used the dielectric function of c-Si and implanted amorphous silicon (a-Si) mixed with voids. The regression analysis of SE spectra clearly shows the effect of different doses of implantation. The sectioning reflects that to the full range of argon ions the porous silicon became amorphous and denser. The overall thickness of the originally porous layer also significantly reduced (from 670 nm to 320 nm) due to the argon implantation." @default.
• W2092114607 created "2016-06-24" @default.
• W2092114607 creator A5009992733 @default.
• W2092114607 creator A5012678520 @default.
• W2092114607 creator A5016185123 @default.
• W2092114607 creator A5021864361 @default.
• W2092114607 creator A5025610471 @default.
• W2092114607 creator A5062976622 @default.
• W2092114607 creator A5078158874 @default.
• W2092114607 creator A5090735013 @default.
• W2092114607 date "1996-04-01" @default.
• W2092114607 modified "2023-10-18" @default.
• W2092114607 title "Characterization of different porous silicon structures by spectroscopic ellipsometry" @default.
• W2092114607 cites W1969501108 @default.
• W2092114607 cites W1992340920 @default.
• W2092114607 cites W2029494088 @default.
• W2092114607 cites W2045357964 @default.
• W2092114607 cites W2063799122 @default.
• W2092114607 cites W2064825215 @default.
• W2092114607 cites W2082537050 @default.
• W2092114607 cites W2094063142 @default.
• W2092114607 doi "https://doi.org/10.1016/0040-6090(95)08058-9" @default.
• W2092114607 hasPublicationYear "1996" @default.
• W2092114607 type Work @default.
• W2092114607 sameAs 2092114607 @default.
• W2092114607 citedByCount "49" @default.
• W2092114607 countsByYear W20921146072013 @default.
• W2092114607 countsByYear W20921146072014 @default.
• W2092114607 countsByYear W20921146072015 @default.
• W2092114607 countsByYear W20921146072016 @default.
• W2092114607 countsByYear W20921146072017 @default.
• W2092114607 countsByYear W20921146072019 @default.
• W2092114607 countsByYear W20921146072020 @default.
• W2092114607 countsByYear W20921146072021 @default.
• W2092114607 countsByYear W20921146072022 @default.
• W2092114607 crossrefType "journal-article" @default.
• W2092114607 hasAuthorship W2092114607A5009992733 @default.
• W2092114607 hasAuthorship W2092114607A5012678520 @default.
• W2092114607 hasAuthorship W2092114607A5016185123 @default.
• W2092114607 hasAuthorship W2092114607A5021864361 @default.
• W2092114607 hasAuthorship W2092114607A5025610471 @default.
• W2092114607 hasAuthorship W2092114607A5062976622 @default.
• W2092114607 hasAuthorship W2092114607A5078158874 @default.
• W2092114607 hasAuthorship W2092114607A5090735013 @default.
• W2092114607 hasConcept C100460472 @default.
• W2092114607 hasConcept C113196181 @default.
• W2092114607 hasConcept C137637335 @default.
• W2092114607 hasConcept C159985019 @default.
• W2092114607 hasConcept C171250308 @default.
• W2092114607 hasConcept C178790620 @default.
• W2092114607 hasConcept C18293161 @default.
• W2092114607 hasConcept C185592680 @default.
• W2092114607 hasConcept C19067145 @default.
• W2092114607 hasConcept C191897082 @default.
• W2092114607 hasConcept C192562407 @default.
• W2092114607 hasConcept C199289684 @default.
• W2092114607 hasConcept C2776390347 @default.
• W2092114607 hasConcept C2776685891 @default.
• W2092114607 hasConcept C2779227376 @default.
• W2092114607 hasConcept C2779667780 @default.
• W2092114607 hasConcept C2780565262 @default.
• W2092114607 hasConcept C43617362 @default.
• W2092114607 hasConcept C49040817 @default.
• W2092114607 hasConcept C544956773 @default.
• W2092114607 hasConcept C547737533 @default.
• W2092114607 hasConcept C56052488 @default.
• W2092114607 hasConcept C6648577 @default.
• W2092114607 hasConcept C80086925 @default.
• W2092114607 hasConcept C8010536 @default.
• W2092114607 hasConcept C87359718 @default.
• W2092114607 hasConceptScore W2092114607C100460472 @default.
• W2092114607 hasConceptScore W2092114607C113196181 @default.
• W2092114607 hasConceptScore W2092114607C137637335 @default.
• W2092114607 hasConceptScore W2092114607C159985019 @default.
• W2092114607 hasConceptScore W2092114607C171250308 @default.
• W2092114607 hasConceptScore W2092114607C178790620 @default.
• W2092114607 hasConceptScore W2092114607C18293161 @default.
• W2092114607 hasConceptScore W2092114607C185592680 @default.
• W2092114607 hasConceptScore W2092114607C19067145 @default.
• W2092114607 hasConceptScore W2092114607C191897082 @default.
• W2092114607 hasConceptScore W2092114607C192562407 @default.
• W2092114607 hasConceptScore W2092114607C199289684 @default.
• W2092114607 hasConceptScore W2092114607C2776390347 @default.
• W2092114607 hasConceptScore W2092114607C2776685891 @default.
• W2092114607 hasConceptScore W2092114607C2779227376 @default.
• W2092114607 hasConceptScore W2092114607C2779667780 @default.
• W2092114607 hasConceptScore W2092114607C2780565262 @default.
• W2092114607 hasConceptScore W2092114607C43617362 @default.
• W2092114607 hasConceptScore W2092114607C49040817 @default.
• W2092114607 hasConceptScore W2092114607C544956773 @default.
• W2092114607 hasConceptScore W2092114607C547737533 @default.
• W2092114607 hasConceptScore W2092114607C56052488 @default.
• W2092114607 hasConceptScore W2092114607C6648577 @default.
• W2092114607 hasConceptScore W2092114607C80086925 @default.
• W2092114607 hasConceptScore W2092114607C8010536 @default.
• W2092114607 hasConceptScore W2092114607C87359718 @default.
• W2092114607 hasIssue "1-2" @default.
• W2092114607 hasLocation W20921146071 @default.

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