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- W2092131343 abstract "The Talbot effect is a self-imaging phenomenon enabling lens-less imaging. The interval of the focus position is called the Talbot distance. To maintain pattern fidelity, the accurate focus position of the self-imaging needs to be known. The depth of focus based on Rayleigh’s criterion is analytically a quarter of the Talbot distance. In a hexagonal array of a fine pitch, the Talbot distance derived from 2nd-order approximation is inaccurate. The analytically accurate expression of the Talbot distance for hexagonal arrays is shown in imaging of low-order diffraction rays." @default.
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- W2092131343 date "2014-07-01" @default.
- W2092131343 modified "2023-09-25" @default.
- W2092131343 title "Focus position and depth of two-dimensional patterning by Talbot effect lithography" @default.
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- W2092131343 doi "https://doi.org/10.1016/j.mee.2014.05.019" @default.
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