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- W2092142986 abstract "Abstract Semi-insulating polycrystalline silicon films were deposited using different N 2 O/SiH 4 ratios, different pressures, at 650 and 700 °C, in a low-pressure chemical vapor deposition furnace. The deposition rate of the films increased with increasing pressure, increasing temperature and decreasing N 2 O/SiH 4 ratio. At higher N 2 O/SiH 4 ratios, more oxygen is incorporated in the film. Oxygen rich films had lower conductivities and lower dielectric constants than silicon rich films. The annealing of the films, at only 430 °C, decreased the conductivity indicating that more silicon-oxygen bonds are formed. The films also proved to be photoconductive." @default.
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- W2092142986 date "2004-07-01" @default.
- W2092142986 modified "2023-09-26" @default.
- W2092142986 title "Non-stoichiometric silicon oxide deposited at low gaseous N2O/SiH4 ratios" @default.
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- W2092142986 doi "https://doi.org/10.1016/j.tsf.2003.12.087" @default.
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