Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092169946> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2092169946 abstract "A new algorithm for an Applied Materials CD-SEM metrology tool has been developed which gives a quantitative characterization of the quality of contact holes in photoresist. This is a non-destructive technique that allows users to assess the cross sectional profile of a contact hole from top-down measurements thus avoiding the time- consuming and expensive task of measuring cross sections. This analysis is based on the shape of the SEM waveform that is created when a contact hole is measured. The algorithm generates a numerical grade for the contact profile, which is based on the shape of the waveform. The classification of the contact hole into different Profile Grades can then be determine due to the strong correlation between the shape of the waveform and the cross-section profile of the contact hole. The Profile Grades have been found to be in excellent agreement with SEM cross-sections. When this technique is applied to contact holes across a focus-exposure matrix wafer, the algorithm gives grades which clearly delimit the domain in which the process parameters produce open, sharp- edged contacts. In many cases it was found that the CD measurement alone was insufficient to determine if a given contact hole was actually open. The combination of the CD measurements with the profile grades is a particularly powerful tool to determine ideal process parameters for lithography, and determination of the profile grades becomes essential as tool-sets are pushed toward the limits of their capability. The following paper contrast on 250 nm contact holes but presents data on contact holes ranging in size from 200 nm to 500 nm." @default.
- W2092169946 created "2016-06-24" @default.
- W2092169946 creator A5049555849 @default.
- W2092169946 creator A5061157307 @default.
- W2092169946 creator A5087272840 @default.
- W2092169946 date "1999-06-14" @default.
- W2092169946 modified "2023-09-27" @default.
- W2092169946 title "Contact hole characterization by SEM waveform analysis" @default.
- W2092169946 doi "https://doi.org/10.1117/12.350819" @default.
- W2092169946 hasPublicationYear "1999" @default.
- W2092169946 type Work @default.
- W2092169946 sameAs 2092169946 @default.
- W2092169946 citedByCount "4" @default.
- W2092169946 crossrefType "proceedings-article" @default.
- W2092169946 hasAuthorship W2092169946A5049555849 @default.
- W2092169946 hasAuthorship W2092169946A5061157307 @default.
- W2092169946 hasAuthorship W2092169946A5087272840 @default.
- W2092169946 hasConcept C120665830 @default.
- W2092169946 hasConcept C121332964 @default.
- W2092169946 hasConcept C160671074 @default.
- W2092169946 hasConcept C171250308 @default.
- W2092169946 hasConcept C192209626 @default.
- W2092169946 hasConcept C192562407 @default.
- W2092169946 hasConcept C195766429 @default.
- W2092169946 hasConcept C197424946 @default.
- W2092169946 hasConcept C204223013 @default.
- W2092169946 hasConcept C24890656 @default.
- W2092169946 hasConcept C2780841128 @default.
- W2092169946 hasConcept C41008148 @default.
- W2092169946 hasConcept C49040817 @default.
- W2092169946 hasConcept C554190296 @default.
- W2092169946 hasConcept C76155785 @default.
- W2092169946 hasConceptScore W2092169946C120665830 @default.
- W2092169946 hasConceptScore W2092169946C121332964 @default.
- W2092169946 hasConceptScore W2092169946C160671074 @default.
- W2092169946 hasConceptScore W2092169946C171250308 @default.
- W2092169946 hasConceptScore W2092169946C192209626 @default.
- W2092169946 hasConceptScore W2092169946C192562407 @default.
- W2092169946 hasConceptScore W2092169946C195766429 @default.
- W2092169946 hasConceptScore W2092169946C197424946 @default.
- W2092169946 hasConceptScore W2092169946C204223013 @default.
- W2092169946 hasConceptScore W2092169946C24890656 @default.
- W2092169946 hasConceptScore W2092169946C2780841128 @default.
- W2092169946 hasConceptScore W2092169946C41008148 @default.
- W2092169946 hasConceptScore W2092169946C49040817 @default.
- W2092169946 hasConceptScore W2092169946C554190296 @default.
- W2092169946 hasConceptScore W2092169946C76155785 @default.
- W2092169946 hasLocation W20921699461 @default.
- W2092169946 hasOpenAccess W2092169946 @default.
- W2092169946 hasPrimaryLocation W20921699461 @default.
- W2092169946 hasRelatedWork W1488705670 @default.
- W2092169946 hasRelatedWork W2000943432 @default.
- W2092169946 hasRelatedWork W2012284266 @default.
- W2092169946 hasRelatedWork W2027770176 @default.
- W2092169946 hasRelatedWork W2052385620 @default.
- W2092169946 hasRelatedWork W2079561922 @default.
- W2092169946 hasRelatedWork W2084075350 @default.
- W2092169946 hasRelatedWork W2123234706 @default.
- W2092169946 hasRelatedWork W2921826941 @default.
- W2092169946 hasRelatedWork W3204723757 @default.
- W2092169946 isParatext "false" @default.
- W2092169946 isRetracted "false" @default.
- W2092169946 magId "2092169946" @default.
- W2092169946 workType "article" @default.