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• W2092182302 startingPage "018003" @default.
• W2092182302 abstract "In order to meet the requirements of industries dealing with hydrogen, the membranes for hydrogen purification and separation need to be improved for both hydrogen permeability and selectivity. However, it has been difficult to enhance both properties simultaneously because their properties were contrary to each other. In this study, we fabricated a Pd-alloy membrane by using micro-polishing of porous metal support, plasma surface treatment, Pd–Cu sputtering at high temperature, and Cu-reflow process, and achieved both high permeability [10-6 mol/(m2·s·Pa)] and infinite selectivity. This Pd–Cu–Ni ternary alloy membrane could be commercialized for the purification and separation of hydrogen in various applications." @default.
• W2092182302 created "2016-06-24" @default.
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• W2092182302 date "2010-01-20" @default.
• W2092182302 modified "2023-09-23" @default.
• W2092182302 title "Study on the Perm-Selectivity of Thin Pd–Cu–Ni Ternary Alloy Membrane for Hydrogen Purification and Separation" @default.
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• W2092182302 doi "https://doi.org/10.1143/jjap.49.018003" @default.
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