FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092187023> ?p ?o ?g. }

• W2092187023 endingPage "262" @default.
• W2092187023 startingPage "253" @default.
• W2092187023 abstract "Hydrogenated amorphous silicon carbide (a-SiCx:H) thin films were prepared by plasma-enhanced chemical vapor deposition using mixtures of silane (SiH4 and a systematic series of hydrocarbon gases. It is found that, at fixed molar gas ratios, the chemical nature of the hydrocarbon gas profoundly affects the composition of the film. The same film composition can often be obtained by admixing different hydrocarbon gases with silane at different ratios. Material properties such as optical band gap, refractive index, and mechanical abrasion resistance are found to depend on the elemental film composition, rather than on the composition of the precursor gas mixture." @default.
• W2092187023 created "2016-06-24" @default.
• W2092187023 creator A5042721729 @default.
• W2092187023 creator A5055308908 @default.
• W2092187023 creator A5078238044 @default.
• W2092187023 date "1989-10-01" @default.
• W2092187023 modified "2023-10-15" @default.
• W2092187023 title "Properties of hydrogenated amorphous silicon carbide films prepared by plasma-enhanced chemical vapor deposition" @default.
• W2092187023 cites W1988592900 @default.
• W2092187023 cites W1997178783 @default.
• W2092187023 cites W2005442885 @default.
• W2092187023 cites W2014268181 @default.
• W2092187023 cites W2016613982 @default.
• W2092187023 cites W2039477086 @default.
• W2092187023 cites W2044337770 @default.
• W2092187023 cites W2045884085 @default.
• W2092187023 cites W2065517678 @default.
• W2092187023 cites W2073190518 @default.
• W2092187023 cites W2076424049 @default.
• W2092187023 cites W2089846483 @default.
• W2092187023 cites W2483805890 @default.
• W2092187023 doi "https://doi.org/10.1016/0040-6090(89)90573-7" @default.
• W2092187023 hasPublicationYear "1989" @default.
• W2092187023 type Work @default.
• W2092187023 sameAs 2092187023 @default.
• W2092187023 citedByCount "42" @default.
• W2092187023 countsByYear W20921870232012 @default.
• W2092187023 countsByYear W20921870232013 @default.
• W2092187023 countsByYear W20921870232015 @default.
• W2092187023 countsByYear W20921870232016 @default.
• W2092187023 countsByYear W20921870232018 @default.
• W2092187023 countsByYear W20921870232020 @default.
• W2092187023 countsByYear W20921870232021 @default.
• W2092187023 crossrefType "journal-article" @default.
• W2092187023 hasAuthorship W2092187023A5042721729 @default.
• W2092187023 hasAuthorship W2092187023A5055308908 @default.
• W2092187023 hasAuthorship W2092187023A5078238044 @default.
• W2092187023 hasConcept C113196181 @default.
• W2092187023 hasConcept C121332964 @default.
• W2092187023 hasConcept C127413603 @default.
• W2092187023 hasConcept C149849071 @default.
• W2092187023 hasConcept C151730666 @default.
• W2092187023 hasConcept C159985019 @default.
• W2092187023 hasConcept C171250308 @default.
• W2092187023 hasConcept C175721412 @default.
• W2092187023 hasConcept C178790620 @default.
• W2092187023 hasConcept C185592680 @default.
• W2092187023 hasConcept C19067145 @default.
• W2092187023 hasConcept C191897082 @default.
• W2092187023 hasConcept C192562407 @default.
• W2092187023 hasConcept C2776390347 @default.
• W2092187023 hasConcept C2777207669 @default.
• W2092187023 hasConcept C2778024649 @default.
• W2092187023 hasConcept C2779667780 @default.
• W2092187023 hasConcept C2780722187 @default.
• W2092187023 hasConcept C2816523 @default.
• W2092187023 hasConcept C38347018 @default.
• W2092187023 hasConcept C42360764 @default.
• W2092187023 hasConcept C5335593 @default.
• W2092187023 hasConcept C544956773 @default.
• W2092187023 hasConcept C56052488 @default.
• W2092187023 hasConcept C57410435 @default.
• W2092187023 hasConcept C64297162 @default.
• W2092187023 hasConcept C75937256 @default.
• W2092187023 hasConcept C86803240 @default.
• W2092187023 hasConcept C97355855 @default.
• W2092187023 hasConceptScore W2092187023C113196181 @default.
• W2092187023 hasConceptScore W2092187023C121332964 @default.
• W2092187023 hasConceptScore W2092187023C127413603 @default.
• W2092187023 hasConceptScore W2092187023C149849071 @default.
• W2092187023 hasConceptScore W2092187023C151730666 @default.
• W2092187023 hasConceptScore W2092187023C159985019 @default.
• W2092187023 hasConceptScore W2092187023C171250308 @default.
• W2092187023 hasConceptScore W2092187023C175721412 @default.
• W2092187023 hasConceptScore W2092187023C178790620 @default.
• W2092187023 hasConceptScore W2092187023C185592680 @default.
• W2092187023 hasConceptScore W2092187023C19067145 @default.
• W2092187023 hasConceptScore W2092187023C191897082 @default.
• W2092187023 hasConceptScore W2092187023C192562407 @default.
• W2092187023 hasConceptScore W2092187023C2776390347 @default.
• W2092187023 hasConceptScore W2092187023C2777207669 @default.
• W2092187023 hasConceptScore W2092187023C2778024649 @default.
• W2092187023 hasConceptScore W2092187023C2779667780 @default.
• W2092187023 hasConceptScore W2092187023C2780722187 @default.
• W2092187023 hasConceptScore W2092187023C2816523 @default.
• W2092187023 hasConceptScore W2092187023C38347018 @default.
• W2092187023 hasConceptScore W2092187023C42360764 @default.
• W2092187023 hasConceptScore W2092187023C5335593 @default.
• W2092187023 hasConceptScore W2092187023C544956773 @default.
• W2092187023 hasConceptScore W2092187023C56052488 @default.
• W2092187023 hasConceptScore W2092187023C57410435 @default.
• W2092187023 hasConceptScore W2092187023C64297162 @default.
• W2092187023 hasConceptScore W2092187023C75937256 @default.
• W2092187023 hasConceptScore W2092187023C86803240 @default.
• W2092187023 hasConceptScore W2092187023C97355855 @default.
• W2092187023 hasIssue "1-2" @default.
• W2092187023 hasLocation W20921870231 @default.
• W2092187023 hasOpenAccess W2092187023 @default.

• next